Laser synthesis of copper oxides 2D structures with high Seebeck coefficient and high thermoelectric figure of merit

被引:3
作者
Mulenko, S. A. [1 ]
Stefan, N. [2 ]
Len, E. G. [1 ]
Skoryk, M. A. [1 ]
Popov, V. M. [3 ]
Gudymenko, O. Yo. [4 ]
机构
[1] NAS Ukraine, GV Kurdyumov Inst Met Phys, Academician Vernadsky Blvd 36, UA-03142 Kiev, Ukraine
[2] Natl Inst Lasers, Plasma & Radiat Phys, POB MG 54, Magurele 77125, Romania
[3] NAS Ukraine, Inst Microdevices, 3 Severo Syretskaya, UA-04136 Kiev, Ukraine
[4] NAS Ukraine, VF Lashkaryov Inst Semicond Phys, 41 Nauky Ave, UA-03028 Kiev, Ukraine
关键词
IRON-OXIDE; THIN-FILMS; DEPOSITION; TEMPERATURE;
D O I
10.1007/s10854-021-06115-x
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Semiconductors are considered promising materials of thermo-converters and thermo-sensors. The photons generated by a KrF laser source (lambda = 248 nm, tau(FWHM) <= 25 ns) were used for the synthesis of stable crystalline phases of copper oxides 2D single-layered semiconductor structures via the reaction of ablated copper atoms with oxygen molecules by reactive pulsed laser deposition (RPLD). Obtained semiconductor 2D single-layered structures of (23-75) nm thickness were deposited on 293, 600 or 800 K < 100 > Si substrates in oxygen atmosphere at 1.0, 3.0 and 5.0 Pa. X-ray diffraction analysis evidenced polycrystalline structures of the deposits reviled of two crystalline semiconductor phases CuO (002) and CuO(111). Semiconductor temperature trend was detected with variable energy band gap (E-g) in the range of (0.10-1.5) eV depending on substrate temperature, oxygen pressure and structure thickness. The optimum conditions were found out when the S coefficient was being homogeneously increased from 2.0 mV/K up to 10.5 mV/K and thermoelectric figure of merit (ZT) from 0.0035 up to 9.0 in the range of (290-340) K. The interpretation of behaviour for these 2D single-layered semiconductor structures of thermoelectric properties was provided. Obtained 2D single-layered structures based on copper oxides with such high S coefficient and high ZT are exceptionally strong candidates for a new effective thermo-sensors and thermo-converters operating at moderate temperature. Moreover, RPLD serves as an up to date method for the synthesis of 2D structures with such superior thermo-sensor and thermo-converter properties. These 2D single-layered structures based on copper oxides are among the most promising candidates based on non-toxic precursors for "green" technology fabrication of efficient thermo-sensors and thermo-converters.
引用
收藏
页码:17123 / 17135
页数:13
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