[1] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[2] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[3] Natl Cheng Kung Univ, Dept Elect Engn, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan
[4] Microsyst Technol Ctr, Ind Technol Res Inst S, Tainan 709, Taiwan
[5] Natl Nanodevice Labs, Tainan 741, Taiwan