An integrated antenna excited by piezoelectric transducers

被引:0
|
作者
Weber, RJ [1 ]
机构
[1] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA
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暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper presents the structure of and measurement data from an L-band integrated antenna on a silicon wafer. The antenna is excited from a front side piezoelectric transducer which receives energy generated by another piezoelectric transducer on the back side of the wafer. The structures allows a low EMI susceptibility structure to be build and integrated on a chip and demonstrates one method of 3-D integrated circuits.
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收藏
页码:666 / 669
页数:2
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