An integrated antenna excited by piezoelectric transducers

被引:0
|
作者
Weber, RJ [1 ]
机构
[1] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA
关键词
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper presents the structure of and measurement data from an L-band integrated antenna on a silicon wafer. The antenna is excited from a front side piezoelectric transducer which receives energy generated by another piezoelectric transducer on the back side of the wafer. The structures allows a low EMI susceptibility structure to be build and integrated on a chip and demonstrates one method of 3-D integrated circuits.
引用
收藏
页码:666 / 669
页数:2
相关论文
共 50 条
  • [1] Integrated and Flexible Piezoelectric Ultrasonic Transducers
    Jen, C. -K.
    Kobayashi, M.
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1119 - 1127
  • [2] Integrated piezoelectric plate acoustic waves transducers
    Wu, K. -T.
    Jen, C. -K.
    Kobayashi, M.
    ELECTRONICS LETTERS, 2008, 44 (12) : 776 - 777
  • [3] Integrated ultrasonic piezoelectric transducers for medical applications
    Holc, J
    Kosec, M
    Levassort, F
    Tran-Huu-Hue, LP
    Lethiecq, M
    INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2003, 33 (01): : 53 - 56
  • [4] SIGNALS FORMED BY SURFACE-EXCITED THICK PIEZOELECTRIC TRANSDUCERS
    KOROLEV, MV
    KARPELSON, AE
    SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR, 1979, 15 (09): : 756 - 762
  • [5] NONUNIFORMLY POLARIZED SURFACE-EXCITED THICK PIEZOELECTRIC TRANSDUCERS
    KOROLEV, MV
    KARPELSON, AE
    SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR, 1980, 16 (08): : 581 - 588
  • [6] ULTRASONIC FIELDS OF SURFACE-EXCITED THICK PIEZOELECTRIC TRANSDUCERS
    KOROLEV, MV
    SHEVALDYKIN, VG
    KARPELSON, AE
    SOVIET JOURNAL OF NONDESTRUCTIVE TESTING-USSR, 1979, 15 (05): : 426 - 432
  • [7] Poling Technologies and Design Optimization for Integrated Piezoelectric Bulk Transducers and Piezoelectric Composites
    Esslinger, Sophia
    Schoenecker, Andreas
    Neumeister, Peter
    ADVANCED ENGINEERING MATERIALS, 2018, 20 (12)
  • [8] Ferroelectric and piezoelectric thin films and their applications for integrated capacitors, piezoelectric ultrasound transducers and piezoelectric switches
    Klee, M.
    Boots, H.
    Kumar, B.
    van Heesch, C.
    Mauczok, R.
    Keur, W.
    de Wild, M.
    van Esch, H.
    Roest, A. L.
    Reimann, K.
    van Leuken, L.
    Wunnicke, O.
    Zhao, J.
    Schmitz, G.
    Mienkina, M.
    Mleczko, M.
    Tiggelman, M.
    FUNDAMENTALS AND TECHNOLOGY OF MULTIFUNCTIONAL OXIDE THIN FILMS (SYMPOSIUM G, EMRS 2009 SPRING MEETING), 2010, 8
  • [9] SIGNALS FORMED BY SURFACE-EXCITED THICK PIEZOELECTRIC TRANSDUCERS.
    Korolev, M.V.
    Karpel'son, A.E.
    The Soviet journal of nondestructive testing, 1979, 15 (09): : 756 - 762
  • [10] Stress in GaAs ridge waveguides integrated with ZnO piezoelectric transducers
    Kim, HK
    Almashary, BA
    Kleemeier, W
    Li, Y
    Langer, DW
    Cassidy, DT
    Bruce, DM
    COMPOUND SEMICONDUCTORS 1995, 1996, 145 : 431 - 436