Diamond planar refractive lenses for third- and fourth-generation X-ray sources

被引：67

作者：

Nöhammer, B ^{[1
]}

Hoszowska, J

Freund, AK

David, C

机构：

[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

[2] European Synchrotron Radiat Facil, F-38043 Grenoble, France

来源：

JOURNAL OF SYNCHROTRON RADIATION | 2003年 / 10卷

关键词：

X-ray optics; focusing; X-ray free-electron lasers; reactive-ion etching;

D O I：

10.1107/S0909049502019532

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The fabrication and testing of planar refractive hard X-ray lenses made from bulk CVD diamond substrates is reported. The lens structures were generated by electron-beam lithography and transferred by reactive-ion etching into the diamond. Various lens designs were fabricated and tested at 12.4 and 17.5 keV photon energy. Efficiencies of up to 71% and gains of up to 26 were achieved. A line focus of 3.2 mum (FWHM) was measured. These lenses should be able to withstand the extreme flux densities expected at the planned fourth-generation X-ray sources.

引用

页码：168 / 171

页数：4