HIGH PRESSURE ON-CHIP VALVES FOR THERMOPLASTIC MICROFLUIDICS

被引:0
作者
Chen, Chien-Fu [1 ]
Liu, Jikun [1 ]
Chang, Chien-Cheng
DeVoe, Don L. [1 ]
机构
[1] Univ Maryland, Dept Mech Engn, College Pk, MD 20742 USA
来源
IMECE 2009: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 12, PTS A AND B | 2010年
关键词
SOFT LITHOGRAPHY; SCREW;
D O I
暂无
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
A high-pressure microvalve technology based on the integration of discrete elastomeric elements into rigid thermoplastic chips is described. The low-dead-volume valves employ deformable polydimethylsiloxane (PDMS) plugs actuated using a threaded stainless steel needle, allowing exceptionally high pressure resistance to be achieved. The simple fabrication process is made possible through the use of poly(ethylene glycol) (PEG) as a removable blocking material to avoid contamination of PDMS within the flow channel while yielding a smooth contact surface with the PDMS valve surface. Burst pressure tests reveal that the valves can withstand over 24MPa without leakage.
引用
收藏
页码:471 / 474
页数:4
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