Influence of CeO2 layer thickness on the properties of CeO2/Gd2O3 multilayers prepared by pulsed laser deposition

被引：3

作者：

Mishra, Maneesha ^{[1
,2
]}

Kuppusami, P. ^{[3
]}

Reddy, V. R. ^{[4
]}

Ghosh, C. ^{[1
]}

Divakar, R. ^{[1
]}

Ramaseshan, R. ^{[5
]}

Singh, Akash ^{[1
]}

Thirumurugesan, R. ^{[1
]}

Mohandas, E. ^{[1
]}

机构：

[1] Indira Gandhi Ctr Atom Res, Mat Synth & Struct Characterisat Div, Phys Met Grp, Kalpakkam 603102, Tamil Nadu, India

[2] Univ Ulsan, Sch Mech Engn, Ulsan, South Korea

[3] Sathyabama Univ, Ctr Nanosci & Nanotechnol, Madras 600119, Tamil Nadu, India

[4] UGC DAE Consortium Sci Res, Indore, Madhya Pradesh, India

[5] Indira Gandhi Ctr Atom Res, Surface & Nano Sci Div, Kalpakkam 603102, Tamil Nadu, India

来源：

VACUUM | 2015年 / 113卷

关键词：

Multilayer; CeO2; Gd2O3; XRD; Optical properties; CERIA THIN-FILMS; OXIDE FUEL-CELLS; ELECTRICAL-PROPERTIES; COMPOSITE HARDNESS; OPTICAL-PROPERTIES; DOPED CERIA; TEMPERATURE; COATINGS; ZIRCONIA; GROWTH;

D O I：

10.1016/j.vacuum.2014.12.009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

CeO2/Gd2O3 multilayers were prepared on Si (100), quartz and inconel-783 substrates by pulsed laser deposition technique at an oxygen partial pressure of 2 Pa and substrate temperatures of 300 and 873 K. The layer thickness of CeO2 was varied from 5 to 30 nm, whereas Gd2O3 layer thickness was kept constant (similar to 10 nm). The phase and crystallite size of the films were characterized by X-ray diffraction (XRD), X-ray reflectivity (XRR), Raman spectroscopy, atomic force microscopy (AFM) and high resolution transmission electron microscopy (HRTEM) techniques. The layer thicknesses, measured by XRR as well as from HRTEM micrographs were in good agreement with each other. The CeO2/Gd2O3 multilayers show transmittance of similar to 70%. Nanoindentation measurements indicated that the hardness values of the multilayers were higher than that of single layers of CeO2 and Gd2O3 thin films. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：64 / 74

页数：11

共 55 条

[1] UV protection filters by dielectric multilayer thin films on Glass BK-7 and Infrasil 301 [J].

Abdel-Aziz, M. M. ;

Azim, Osama A. ;

Abdel-Wahab, L. A. ;

Seddik, Mohamed M. .

APPLIED SURFACE SCIENCE, 2006, 252 (24) :8716-8723

[2] Micromechanical estimation of composite hardness using nanoindentation technique for thin-film coated system [J].

Ahn, JH ;

Kwon, D .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2000, 285 (1-2) :172-179

[3] Sol-gel derived nanoporous cerium oxide film for application to cholesterol biosensor [J].

Ansari, Anees A. ;

Kaushik, A. ;

Solanki, P. R. ;

Malhotra, B. D. .

ELECTROCHEMISTRY COMMUNICATIONS, 2008, 10 (09) :1246-1249

[4] Overview no. 130 - Size effects in materials due to microstructural and dimensional constraints: A comparative review [J].

Arzt, E .

ACTA MATERIALIA, 1998, 46 (16) :5611-5626

[5] Characterization of Al2O3/ZrO2 nano multilayer thin films prepared by pulsed laser deposition [J].

Balakrishnan, G. ;

Kuppusami, P. ;

Murugesan, S. ;

Ghosh, C. ;

Divakar, R. ;

Mohandas, E. ;

Sastikumar, D. .

MATERIALS CHEMISTRY AND PHYSICS, 2012, 133 (01) :299-303

[6] Thermal stability of CeO2/ZrO2 multilayer thin films prepared by pulsed laser deposition [J].

Balakrishnan, G. ;

Kuppusami, P. ;

Murugesan, S. ;

Ghosh, Chanchal ;

Ramachandran, Divakar ;

Mohandas, E. ;

Sastikumar, D. .

TRANSACTIONS OF THE INDIAN INSTITUTE OF METALS, 2011, 64 (03) :297-299

[7] A study of microstructural and optical properties of nanocrystalline ceria thin films prepared by pulsed laser deposition [J].

Balakrishnan, G. ;

Sundari, S. Tripura ;

Kuppusami, P. ;

Mohan, P. Chandra ;

Srinivasan, M. P. ;

Mohandas, E. ;

Ganesan, V. ;

Sastikumar, D. .

THIN SOLID FILMS, 2011, 519 (08) :2520-2526

[8] Stabilization of tetragonal and cubic phases of ZrO2 in pulsed sputter deposited ZrO2/Al2O3 and ZrO2/Y2O3 nanolayered thin films [J].

Barshilia, Harish C. ;

Deepthi, B. ;

Rajam, K. S. .

JOURNAL OF APPLIED PHYSICS, 2008, 104 (11)

[9] A Raman-scattering study on the interface structure of nanolayered TiAIN/TiN and TiN/NbN multilayer thin films grown by reactive dc magnetron sputtering [J].

Barshilia, HC ;

Rajam, KS .

JOURNAL OF APPLIED PHYSICS, 2005, 98 (01)

[10] Synthesis, structure, microstructure and mechanical characteristics of MO CVD deposited zirconia films [J].

Bernard, O. ;

Huntz, A. M. ;

Andrieux, M. ;

Seiler, W. ;

Ji, V. ;

Poissonnet, S. .

APPLIED SURFACE SCIENCE, 2007, 253 (10) :4626-4640

← 1 2 3 4 5 6 →