Optical properties of SiC/SiO2 composite thin film

被引：1
|
作者：
Yi, Jian [1 ]
He, XiaoDong [1 ]
Sun, Yue [1 ]
Li, Yao [1 ]
机构：
[1] Harbin Inst Technol, Ctr Composite Mat, Harbin 150001, Peoples R China
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2007年 / 49卷 / 07期
关键词：
optical; SiC; SiO(2); FTIR; EB-PVD;
D O I：
10.1002/mop.22487
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
SiC film was deposited by electron beam-physical vapor deposition on thermal oxidized silicon substrates at 750 degrees C, and SiC/ SiO(2) composite thin film was prepared. The obtained composite film was analyzed by Fourier-transform infrared (FTIR) transmission and reflection spectroscopy, and the film reveals an amorphous structure and a high emissivity. (C) 2007 Wiley Periodicals, Inc.
引用
收藏
页码：1551 / 1553
页数：3
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