Efficient hard X-ray source using femtosecond plasma at solid targets with a modified surface

Recent results on constructing of an efficient hard X-ray source using solid targets irradiated by high-contrast 200-fs laser pulses with an intensity above 10(16) W/cm(2) are presented. We used different solid targets with a laser- and electrochemically modified surface layer: craters, pyramidal cavities, porous silicon, gratings. Experimental data obtained confirms that using solid targets with a corrugated surface one can achieve a prominent increase both in the efficiency of hard X-ray generation (in the quanta range 2-30 keV) and in the hot electron temperature of plasma.