Preparation and Analysis of Molybdenum Coating on the Surface of Silicon Carbide

The molybdenum coating was deposited on the surface of silicon carbide by a magnetron sputtering method, and its surface morphology and chemical composition were analyzed. In order to ameliorate the surface morphology and the state of the molybdenum coating, different kinds of crystallized heat-treatment were carried out. The evolution of the surface morphology and chemical composition of the molybdenum coating were investigated. The results show that the molybdenum coating can be deposited on the surface of silicon carbide by the magnetron sputtering method. With longer sputtering time, the roughness and the thickness of the coating are enhanced, and furthermore the molybdenum on the surface is in amorphous state. During the crystallized heat-treatment process, the morphology evolution of the molybdenum coating is as follows: the primary densification phase, the compact crystallization of molybdenum atoms, the dispersive accumulation of molybdenum coating, and the reaction between molybdenum and silicon carbide. In addition, the corresponding state evolution of molybdenum atoms is amorphous molybdenum, crystalline molybdenum, and molybdenum compound (Mo2C and MoSi2). And the optimum heat treatment temperature range is about 800 similar to 900 degrees C. It is believed that the uniform and compact Mo coating will broaden the application filed of SiC particles as the reinforcement in metal matrix composites, due to advantages of controlling the interfacial reaction and improving the interface bonding force in metal matrix composite.