Arsenic incorporation in GaN during growth by molecular beam epitaxy

被引:6
|
作者
Foxon, CT [1 ]
Novikov, SV
Li, T
Campion, RP
Winser, AJ
Harrison, I
Kappers, MJ
Humphreys, CJ
机构
[1] Univ Nottingham, Sch Phys & Astron, Nottingham NG7 2RD, England
[2] Univ Nottingham, Sch Elect & Elect Engn, Nottingham NG7 2RD, England
[3] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
关键词
molecular beam epitaxy; nitrides; semiconducting III-V materials;
D O I
10.1016/S0022-0248(02)02243-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have studied arsenic incorporation in GaN films grown by plasma-assisted molecular beam epitaxy. Depending on the growth conditions, arsenic in GaN either produces blue emission or GaNAs alloy formation occurs. A general growth model is proposed. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:510 / 514
页数:5
相关论文
共 50 条
  • [21] Uniformity and control of surface morphology during growth of GaN by molecular beam epitaxy
    Poblenz, C
    Waltereit, P
    Speck, JS
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1379 - 1385
  • [22] Mechanisms of magnesium incorporation into GaN layers grown by molecular beam epitaxy
    Cheng, TS
    Novikov, SV
    Foxon, CT
    Orton, JW
    SOLID STATE COMMUNICATIONS, 1999, 109 (07) : 439 - 443
  • [23] In situ control of gan growth by molecular beam epitaxy
    R. Held
    D. E. Crawford
    A. M. Johnston
    A. M. Dabiran
    P. I. Cohen
    Journal of Electronic Materials, 1997, 26 : 272 - 280
  • [24] Molecular beam epitaxy growth of GaN, AIN and InN
    Wang, XQ
    Yoshikawa, A
    PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 2004, 48-9 : 42 - 103
  • [25] In situ control of GaN growth by molecular beam epitaxy
    Held, R
    Crawford, DE
    Johnston, AM
    Dabiran, AM
    Cohen, PI
    JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (03) : 272 - 280
  • [26] Growth of GaN with warm ammonia by molecular beam epitaxy
    Kawaharazuka, A.
    Yoshizaki, T.
    Ploog, K. H.
    Horikoshi, Y.
    JOURNAL OF CRYSTAL GROWTH, 2009, 311 (07) : 2025 - 2028
  • [27] Plasma assisted molecular beam epitaxy growth of GaN
    Einfeldt, S
    Birkle, U
    Thomas, C
    Fehrer, M
    Heinke, H
    Hommel, D
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 50 (1-3): : 12 - 15
  • [28] GaN growth by compound source molecular beam epitaxy
    Honda, T
    Sato, K
    Hashimoto, T
    Shinohara, M
    Kawanishi, H
    JOURNAL OF CRYSTAL GROWTH, 2002, 237 (1-4 II) : 1008 - 1011
  • [29] Homoepitaxial growth of GaN using molecular beam epitaxy
    Gassmann, A
    Suski, T
    Newman, N
    Kisielowski, C
    Jones, E
    Weber, ER
    LilientalWeber, Z
    Rubin, MD
    Helava, HI
    Grzegory, I
    Bockowski, M
    Jun, J
    Porowski, S
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (04) : 2195 - 2198
  • [30] Growth of GaN on Si(0001) by molecular beam epitaxy
    Lee, CD
    Sagar, A
    Feenstra, RM
    Sarney, WL
    Salamanca-Riba, L
    Hsu, JWP
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2001, 188 (02): : 595 - 599