Hybrid integration of an evanescently coupled AlGaAs microdisk resonator with a silicon waveguide by nanoscale-accuracy transfer printing

被引:20
作者
Guilhabert, B. [1 ]
Mcphillimy, J. [1 ]
May, S. [2 ]
Klitis, C. [2 ]
Dawson, M. D. [1 ]
Sorel, M. [2 ]
Strain, M. J. [1 ]
机构
[1] Univ Strathclyde, Dept Phys, Inst Photon, Glasgow G1 1RD, Lanark, Scotland
[2] Univ Glasgow, Sch Engn, Oakfield Ave, Glasgow G12 8LT, Lanark, Scotland
基金
英国工程与自然科学研究理事会;
关键词
LIGHT-EMITTING-DIODES; PHOTONIC DEVICES; LITHIUM-NIOBATE; LASERS;
D O I
10.1364/OL.43.004883
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Hybrid integration of a III-V microdisk resonator on a silicon-on-insulator waveguide platform is demonstrated. Transfer printing with nanoscale accuracy is used to micro-assemble an evanescently coupled all-pass microdisk resonator with a targeted coupler gap of 100 nm using pre-fabricated AlGaAs and silicon components. Transmission measurements show hybrid resonances with a loaded Q-factor of 7 x 10(3) and a cavity finesse of over 100. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.
引用
收藏
页码:4883 / 4886
页数:4
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