Stability of nanometer-thick layers in hard coatings

被引:71
作者
Barnett, SA [1 ]
Madan, A
Kim, I
Martin, K
机构
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Funct Coating Technol, Evanston, IL USA
[3] IBM Corp, Microelect Div, Technol Anal Grp, Fishkill, NY USA
关键词
annealing; hardness testing; superhard coating materials; thin films;
D O I
10.1557/mrs2003.57
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This article reviews two topics related to the stability of hard coatings composed of nanometer-thick layers: epitaxial stabilization and high-temperature stability. Early work on nanolayered hard coatings demonstrated large hardness increases as compared with monolithic coatings, but it was subsequently found that the layers interdiffused at elevated temperatures. More recently it has been shown that nanolayers exhibit good stability at elevated temperatures if the layer materials are thermodynamically stable with respect to each other and are able to form low-energy coherent interfaces. This article discusses metal/nitride, nitride/nitride, and nitride/boride nanolayers that exhibit good high-temperature stability and hardness values that are maintained (or even increase) after high-temperature annealing. Epitaxial stabilization of nonequilibrium structures in thin layers is a well-known phenomenon that has been applied to hard nitride materials. In particular, AlN, which crystallizes in the hexagonal wurtzite structure in bulk form, was stabilized in the rock-salt cubic structure in nitride/nitride nanolayers (e.g. AlN/TiN). These results and the current understanding of epitaxial stabilization in hard nanolayers are discussed.
引用
收藏
页码:169 / 172
页数:4
相关论文
共 31 条
  • [1] Barnett S.A., 1993, PHYS THIN FILMS, P1
  • [2] BARNETT SA, 1994, ANNU REV MATER SCI, V24, P481
  • [3] BOLLIER RD, 1998, WEAR SUP COAT C TAMP
  • [4] STRUCTURAL TRANSITIONS IN EPITAXIAL OVERLAYERS
    BRUINSMA, R
    ZANGWILL, A
    [J]. JOURNAL DE PHYSIQUE, 1986, 47 (12): : 2055 - 2073
  • [5] OPTICAL AND STRUCTURAL-PROPERTIES OF III-V NITRIDES UNDER PRESSURE
    CHRISTENSEN, NE
    GORCZYCA, I
    [J]. PHYSICAL REVIEW B, 1994, 50 (07): : 4397 - 4415
  • [6] High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices
    Engström, C
    Madan, A
    Birch, J
    Nastasi, M
    Hultman, L
    Barnett, SA
    [J]. JOURNAL OF MATERIALS RESEARCH, 2000, 15 (02) : 554 - 559
  • [7] ENGSTROM C, UNPUB MECH THERMAL S
  • [8] MAGNETORESISTANCE OF CO/CU SUPERLATTICES GROWN BY MOLECULAR-BEAM EPITAXY
    HALL, MJ
    HICKEY, BJ
    HOWSON, MA
    WALKER, MJ
    XU, J
    GREIG, D
    WISER, N
    [J]. PHYSICAL REVIEW B, 1993, 47 (19): : 12785 - 12793
  • [9] INSPEKTOR A, 1998, WEAR SUP COAT C TAMP
  • [10] DETERMINATION OF THE INTERFACIAL-TENSION BY ZERO CREEP EXPERIMENTS ON MULTILAYERS .1. THEORY
    JOSELL, D
    SPAEPEN, F
    [J]. ACTA METALLURGICA ET MATERIALIA, 1993, 41 (10): : 3007 - 3015