Effect of composition on surface relief morphology in TiNiCu thin films

被引：8

作者：

Cai, M. ^{[1
]}

Fu, Y. Q.

Sanjabi, S.

Barber, Z. H.

Dickinson, J. T.

机构：

[1] Washington State Univ, Dept Phys & Astron, Pullman, WA 99164 USA

[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

[3] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 1PZ, England

来源：

SURFACE & COATINGS TECHNOLOGY | 2007年 / 201卷 / 12期

关键词：

crystallization; martensitic transformation; surface relief; shape memory alloys;

D O I：

10.1016/j.surfcoat.2006.10.033

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

TiNiCu films were deposited on a (100) type Si substrates by co-sputtering of TiNi and Cu targets at room temperature, and then post-annealed at 450 degrees C for crystallization. Significant surface relief due to martensitic transformation occurred on the film surface after cooling, and variations in surface relief morphology (the size and density of martensite crystals) have been quantified with atomic force microscopy. Energy dispersive Xray analysis showed that the surface relief morphological difference in the TiNiCu films is due to the change in composition. It was proposed that the crystallization of the amorphous thin film during annealing behaved differently with chemical composition, which in turn induced fluctuations in phase transformation temperatures at various regions, as confirmed by differential scanning calorimeter measurements. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：5843 / 5849

页数：7

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