X-Ray Scattering Studies of the Surface Structure of Complex Oxide Films during Layer-by-Layer Growth via Pulsed Laser Deposition

被引：7

作者：

Brock, J. D. ^{[1
]}

Ferguson, J. D. ^{[2
]}

Woll, A. R. ^{[3
]}

机构：

[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA

[2] Cornell Univ, Dept Mat Sci, Ithaca, NY 14853 USA

[3] Cornell Univ, Cornell High Energy Synchrotron Source, Ithaca, NY 14853 USA

来源：

METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE | 2010年 / 41A卷 / 05期

基金：

美国国家科学基金会;

关键词：

Pulse Laser Deposition; Diffuse Scattering; Reflection High Energy Electron Diffraction; Differential Scattering Cross Section; False Color Image;

D O I：

10.1007/s11661-009-9910-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report time-resolved X-ray reflectivity and surface diffuse X-ray scattering measurements of the surface evolution during pulsed laser deposition of SrTiO3 thin films. After developing the scattering theory, we illustrate how these data may used to characterize the kinetics of interlayer transport and of the island size distribution during deposition. We then calculate the density-density correlation function in real space and show that it exhibits the expected features.

引用

页码：1162 / 1166

页数：5