Gallium nitride films made by liquid target pulsed laser deposition

被引：2
|
作者：
Sun, XW [1 ]
Xiao, RF [1 ]
Kwok, HS [1 ]
机构：
[1] HONG KONG UNIV SCI & TECHNOL,DEPT ELECT & ELECT ENGN,KOWLOON,HONG KONG
来源：
LASER PROCESSING OF MATERIALS AND INDUSTRIAL APPLICATIONS | 1996年 / 2888卷
关键词：
gallium nitride; zinc oxide buffer; pulsed laser deposition;
D O I：
10.1117/12.253102
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：76 / 86
页数：11
相关论文
共 50 条
  • [11] Superconducting niobium nitride thin films by reactive pulsed laser deposition
    Ufuktepe, Y.
    Farha, A. H.
    Kimura, S. I.
    Hajiri, T.
    Imura, K.
    Mamun, M. A.
    Karadag, F.
    Elmustafa, A. A.
    Elsayed-Ali, H. E.
    THIN SOLID FILMS, 2013, 545 : 601 - 607
  • [12] Mossbauer study of iron nitride films produced by pulsed laser deposition
    Usui, Ryo
    Yamada, Yasuhiro
    Kobayashi, Yoshio
    HYPERFINE INTERACTIONS, 2012, 205 (1-3): : 13 - 16
  • [13] Characterization of rhenium nitride films produced by reactive pulsed laser deposition
    Soto, G.
    Rosas, A.
    Farias, M. H.
    De la Cruz, W.
    Diaz, J. A.
    MATERIALS CHARACTERIZATION, 2007, 58 (06) : 519 - 526
  • [14] Pulsed laser deposition and physical properties of carbon nitride thin films
    Zhang, ZJ
    Fan, SS
    Huang, JL
    Lieber, CM
    JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (01) : 57 - 61
  • [15] Pulsed laser deposition of aluminum nitride thin films for FBAR applications
    Cibert, C.
    Chatras, M.
    Champeaux, C.
    Cros, D.
    Catherinot, A.
    APPLIED SURFACE SCIENCE, 2007, 253 (19) : 8151 - 8154
  • [16] Pulsed laser deposition of oriented aluminum nitride thin films and their application
    Meinschien, J
    Falk, F
    Stafast, H
    SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2, 2000, 338-3 : 1523 - 1526
  • [17] Exploratory phase stabilization in heteroepitaxial gallium oxide films by pulsed laser deposition
    Zhang, Jianguo
    Wang, Wei
    Wu, Simiao
    Geng, Zhiming
    Zhang, Jinfu
    Chen, Li
    Liu, Ningtao
    Yan, Xuejun
    Zhang, Wenrui
    Ye, Jichun
    JOURNAL OF ALLOYS AND COMPOUNDS, 2023, 935
  • [18] Carbon nitride films synthesized by pulsed laser deposition with additional laser irradiation to plume
    Shinozaki, T
    Ooie, T
    Yano, T
    FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 61 - 65
  • [19] Low Temperature Growth of GaN Epitaxial Layers on Sapphire (0001) by Pulsed Laser Deposition Using Liquid Gallium Target
    Kumar, M. Senthil
    Kushvaha, S. S.
    Maurya, K. K.
    SCIENCE OF ADVANCED MATERIALS, 2014, 6 (06) : 1215 - 1220
  • [20] Plasma analysis in the process of pulsed laser deposition of aluminium nitride and titan nitride thin films
    Grigoriu, C
    Apostol, I
    Rizea, R
    Marcu, A
    Dragulinescu, D
    SIOEL '99: SIXTH SYMPOSIUM ON OPTOELECTRONICS, 2000, 4068 : 226 - 231
12345