Diamond-like carbon layer formation on graphite by excimer laser irradiation

被引：11
|
作者：
Mechler, A
Heszler, P
Kantor, Z
Szorenyi, T
Bor, Z
机构：
[1] Hungarian Acad Sci, Res Grp Laser Phys, H-6720 Szeged, Hungary
[2] JATE Univ, Dept Opt & Quantum Elect, H-6720 Szeged, Hungary
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 06期
关键词：
D O I：
10.1007/s003390050729
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Irradiation of highly oriented pyrolytic graphite (HOPG) with ArF excimer laser (lambda = 193 nm) pulses of 2 J/cm(2) fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8 g/cm(3), as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp(3) hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650 degrees C for 30 min recovers the graphite structure.
引用
收藏
页码：659 / 661
页数：3
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