Leakage current characteristics of Pt/Ba0.6Sr0.4TiO3/Pt thin-film capacitors

被引:9
|
作者
Fu, Chunlin [1 ]
Pan, Fusheng
Cai, Wei
机构
[1] Chongqing Univ Sci & Technol, Sch Met & Mat Engn, Chongqing 400050, Peoples R China
[2] Chongqing Univ, Sch Mat Sci & Engn, Chongqing 400044, Peoples R China
关键词
barium strontium titanate; thin film; leakage current; Poole-Frenkel; Schottky emission;
D O I
10.1080/10584580701320404
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Leakage current characteristics of Pt/Ba0.6Sr0.4TiO3/Pt ferroelectric thin-film capacitors were investigated at the temperature range from 273 K to 393 K. It is implied that there are two conduction regions in the capacitors, i.e. ohmic behavior at low voltage (< 0.4 V) and Poole-Frenkel or Schottky emission mechanism at high voltage (> 1.8 V). The depletion layer widths calculated from Poole-Frenkel model and Schottky emission model are 36.9 nm similar to 61.5 nm and 6.8 nm similar to 11.5 nm, respectively. Moreover, the trapped level, the Schottky barrier height, the constant and the effective Richardson constant are 0.56 V, 0.49 V, 0.227A/cm(2).V and 1.15 x 10(-7) A/cm(2).K-2, respectively.
引用
收藏
页码:112 / 118
页数:7
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