Multimode-laser reflectometer with a multichannel wavelength detector and its application

被引:16
作者
Funaba, T
Tanno, N
Ito, H
机构
[1] YAMAGATA UNIV,GRAD PROGRAM HUMAN SENSING & FUNCT SENSOR ENGN,YONEZAWA,YAMAGATA 992,JAPAN
[2] TOHOKU UNIV,ELECT COMMUN RES INST,AOBA KU,SENDAI,MIYAGI 98077,JAPAN
来源
APPLIED OPTICS | 1997年 / 36卷 / 34期
关键词
multimode laser; reflectometer; multichannel wavelength detector; mapping; basic characteristics;
D O I
10.1364/AO.36.008919
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A multimode-laser reflectometer that detects an interference spectrum by use of a multichannel wavelength detector was developed and its characteristics evaluated experimentally. A spatial resolution of 24 mu m and a maximum detectable length of 510 mu m were achieved. Thickness mapping of a coverglass was attempted as an application and was compared with an interference fringe between the surface and the back. Good results that reflected the tendency of an interference fringe were obtained. (C) 1997 Optical Society of America.
引用
收藏
页码:8919 / 8928
页数:10
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