Increased surface roughness by oxygen plasma treatment of graphite/polymer composite

被引:102
作者
Cvelbar, U
Pejovnik, S
Mozetiè, M
Zalar, A
机构
[1] Inst Surface Engn & Optoelect, SI-1000 Ljubljana, Slovenia
[2] Univ Ljubljana, Fac Chem, SI-1000 Ljubljana, Slovenia
关键词
plasma etching; oxygen; graphite; polymer; composite;
D O I
10.1016/S0169-4332(02)01286-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The technology of selective plasma etching was applied to increase the surface roughness of graphite/polymer composite. Etching was performed with a low pressure weakly ionised oxygen plasma created with a RF generator of the output power of 200 W and frequency of 27.12 MHz. The density of charged particles, density of neutral oxygen atoms and the electron temperature was about 1 x 10(16) m(-3), 4 x 10(21) m(-3), and 5 eV, respectively. The effects of plasma treatment were observed by scanning electron microscope (SEM), electron microprobe (EMPA) and Talysurf. It was found that the surface roughness was increased by approximately 15 times, from a virgin sample at the roughness of R-a = 0.27 mum to a very rough surface with R-a = 4 mum. The roughness increased with increasing plasma exposure time. The EMPA results showed that the amount of sulphur in the surface layer decreased with increasing etching time indicating that PPS polymer was the material etched preferentially. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:255 / 261
页数:7
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