Research on ultra-precision machining technology for KTP

被引：6

作者：

Yuan, JL ^{[1
]}

Lou, FY ^{[1
]}

Wang, ZW ^{[1
]}

Chang, M ^{[1
]}

Du, WP ^{[1
]}

De, QF ^{[1
]}

机构：

[1] Zhejiang Univ Tech, Mech & Elect Engn Sch, Hangzhou 310014, Zhejiang, Peoples R China

来源：

ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY | 2004年 / 471-472卷

关键词：

ultra-precision machining; polishing; KTP; lapping;

D O I：

10.4028/www.scientific.net/MSF.471-472.473

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Potassium Titanium Oxide Phosphate (KTP) is a new nonlinear frequency-conversion crystal. It has chemical stability, high nonlinear coefficient, high damage threshold, easily-polished surface, and a broad transparency range. It is be used in solid green laser with medium and low power widely. The requirement for surface roughness is less than 1nm. In this paper, the removal rate and surface roughness are discussed with different velocity, pressure and size of abrasive powder. In order to satisfy the requirement, new polishing techniques with ultra-precision plane polishing machine (Nanopoli-100), and fine AL(2)O(3), SiO2 powders are proposed in this study. The final surface roughness of the KTP is less than 1nm. The machining process and characteristics are also indicated.

引用

页码：473 / 476

页数：4