Simultaneous and precision measurement of yaw and pitch using digital speckle pattern interferometry

被引：2
|
作者：
Wu, Fan [1 ]
Wu, Sijin [1 ]
Li, Weixian [1 ]
Li, Xin [1 ]
机构：
[1] Beijing Informat Sci & Technol Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing, Peoples R China
来源：
OPTICAL ENGINEERING | 2021年 / 60卷 / 03期
基金：
中国国家自然科学基金;
关键词：
degree-of-freedom; angle motions; yaw; pitch; digital speckle pattern interferometry; ANGLE MEASUREMENT; INTERNAL-REFLECTION;
D O I：
10.1117/1.OE.60.3.034103
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A method of simultaneous and precision measurement of yaw and pitch based on digital speckle pattern interferometry is proposed. The relationship between the yaw/pitch and phase distribution is analyzed in detail, resulting in the establishment of the yaw and pitch simultaneous measurement model. A plane fitting method is proposed to separate the two angle motions from a single phase map. The proposed method enjoys the advantages of being free of cooperative target, high-resolution measurement, and compact optical setup. Experimental results show the mean absolute error of the measurement is <1 mu rad. (C) 2021 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数：11
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