Two-channel IR gas sensor with two detectors based on LiTaO3 single-crystal wafer

被引：25

作者：

Zhang Wendong ^{[1
,2
]}

Tan Qiulin ^{[1
,2
]}

Liu Jun ^{[1
]}

Xue Chenyang ^{[2
]}

Xiong Jijun ^{[2
]}

Chou Xiujian ^{[1
]}

机构：

[1] N Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China

[2] Natl Key Lab Elect Measurement Technol, Taiyuan 030051, Shanxi, Peoples R China

来源：

OPTICS AND LASER TECHNOLOGY | 2010年 / 42卷 / 08期

关键词：

LiTaO3; wafer; Gas cell structure; Gas sensor; TANTALATE THIN-FILMS; PYROELECTRIC SENSOR; CORRELATION SPECTROSCOPY; RUTHENIUM-DIOXIDE; POLLUTION; DESIGN;

D O I：

10.1016/j.optlastec.2010.03.014

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An infrared (IR) single-element detector based on a lithium tantalate (LiTaO3) single-crystal wafer has been successfully fabricated. The preparation and design of the device are discussed and analyzed in detail. The processing of a thin LiTaO3 wafer, the characterization of an IR filter window, and the assembly of the wafer and filter are explained. A LiTaO3 sensor element, a CMOS amplifier, a narrow-band filter (which can be selected to operate within the appropriate spectral region), and the read-out circuits are set into a TO-18 vessel. Each TO-18-type detector offers a single channel (a single detection wavelength). Two TO-18 detectors with different filters, one acting as a detection channel and the other as a reference, a broadband light source, a circuit board and a flake of wire gauze are assembled and integrated into a gilded gas cell for the purpose of detecting ethene gas. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：1223 / 1228

页数：6