Glass based micro total analysis systems: Materials, fabrication methods, and applications

被引:75
作者
Tang, Tao [1 ]
Yuan, Yapeng [2 ,3 ]
Yalikun, Yaxiaer [1 ,2 ]
Hosokawa, Yoichiroh [1 ]
Li, Ming [4 ]
Tanaka, Yo [2 ,3 ]
机构
[1] Nara Inst Sci & Technol, Div Mat Sci, Ikoma, Nara 6300192, Japan
[2] RIKEN, Ctr Biosyst Dynam Res BDR, 1-3 Yamadaoka, Suita, Osaka 5650871, Japan
[3] Osaka Univ, Grad Sch Frontier Biosci, Suita, Osaka 5650871, Japan
[4] Macquarie Univ, Sch Engn, Sydney, NSW 2109, Australia
基金
日本学术振兴会;
关键词
Glass; Microfluidic; Fabrication method; Application; SODA-LIME GLASS; FEMTOSECOND LASER; MICROFLUIDIC DEVICE; TRANSPARENT MATERIALS; FUSED-SILICA; SINGLE-CELL; ULTRA-THIN; TO-GLASS; CAPILLARY-ELECTROPHORESIS; HELICAL MICROCHANNELS;
D O I
10.1016/j.snb.2021.129859
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Microfluidics has become recognized as a powerful platform technology with a wide range of applications in various fields, such as biology, biomedicine, chemistry and environment. To achieve higher performance, microfluidic devices are required to have superior optical transparency; mechanical, chemical and thermal stability; as well as easy design and fabrication. All of these requirements make glass as an attractive and ideal material for the fabrication of microfluidic devices due to its excellent characteristics in optical, mechanical, thermal, electrical and chemical aspects in comparison to other materials (e.g., silicon and polydimethylsiloxane). In order to give preliminary guidance for researchers from different backgrounds, we provide a comprehensive overview of the fabrication methods for glass-based microfluidic devices as well as various applications based on different types of glass. This review takes into account recent advances in the fabrication of microfluidics, such as, liquid glass and ultra-thin glass, so as to provide a full understanding of the latest research trend in this area. Finally, some remaining challenges facing the field are summarized, and potential prospects for future work with an emphasis on both emerging techniques are discussed.
引用
收藏
页数:18
相关论文
共 238 条
[1]   One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE [J].
Abe, T ;
Esashi, M .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) :139-143
[2]   Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate [J].
Ahamed, Mohammed J. ;
Senkal, Doruk ;
Trusov, Alexander A. ;
Shkel, Andrei M. .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2015, 24 (04) :790-800
[3]  
Ahamed MJ, 2013, IEEE SENSOR, P1767
[4]   Pneumatically Actuated Thin Glass Microlens for On-Chip Multi-Magnification Observations [J].
Aishan, Yusufu ;
Yalikun, Yaxiaer ;
Tanaka, Yo .
ACTUATORS, 2020, 9 (03)
[5]   Accurate rotation of ultra-thin glass chamber for single-cell multidirectional observation [J].
Aishan, Yusufu ;
Yalikun, Yaxiaer ;
Funano, Shun-ichi ;
Shen, Yigang ;
Tanaka, Yo .
APPLIED PHYSICS EXPRESS, 2020, 13 (02)
[6]   Thin glass micro-dome structure based microlens fabricated by accurate thermal expansion of microcavities [J].
Aishan, Yusufu ;
Yalikun, Yaxiaer ;
Amaya, Satoshi ;
Shen, Yigang ;
Tanaka, Yo .
APPLIED PHYSICS LETTERS, 2019, 115 (26)
[7]   Calcium-assisted glass-to-glass bonding for fabrication of glass microfluidic devices [J].
Allen, Peter B. ;
Chiu, Daniel T. .
ANALYTICAL CHEMISTRY, 2008, 80 (18) :7153-7157
[8]   An Experimental Approach to Determine the Critical Depth of Cut in Brittle-to-Ductile Phase Transition During End Milling of Soda-Lime Glass [J].
Amin, A. K. M. Nurul ;
Bagum, Mst Nasima ;
Fathiah, Noor ;
Konneh, Mohamed ;
Ariff, Tasnim Firdaus Bt Mohamed .
ARABIAN JOURNAL FOR SCIENCE AND ENGINEERING, 2016, 41 (11) :4553-4562
[9]   Microfluidic Model Porous Media: Fabrication and Applications [J].
Anbari, Alimohammad ;
Chien, Hung-Ta ;
Datta, Sujit S. ;
Deng, Wen ;
Weitz, David A. ;
Fan, Jing .
SMALL, 2018, 14 (18)
[10]   Fracture strength of glass chips for high-pressure microfluidics [J].
Andersson, Martin ;
Hjort, Klas ;
Klintberg, Lena .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (09)