Energy and exergy analyses of atomic layer deposition of Al2O3 nano-film process

被引：1

作者：

Li, Tao ^{[1
]}

Wang, Fenfen ^{[1
]}

Zhang, Hong-Chao ^{[2
]}

Yuan, Chris ^{[3
]}

机构：

[1] Dalian Univ Technol, Sch Mech Engn, Dalian 116024, Peoples R China

[2] Texas Tech Univ, Dept Ind Engn, Lubbock, TX USA

[3] Univ Wisconsin, Dept Mech Engn, Milwaukee, WI 53201 USA

来源：

INTERNATIONAL JOURNAL OF EXERGY | 2014年 / 15卷 / 01期

基金：

中国国家自然科学基金; 美国国家科学基金会;

关键词：

energy analysis; ALD; atomic layer deposition; Al2O3; nano-film; first law of thermodynamics; energy flow; second law of thermodynamics; exergy; exergy flow; exergy efficiency; degree of perfection; energy efficiency; energy consumption; energy utilisation efficiency;

D O I：

10.1504/IJEX.2014.065107

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

In this paper, energy and exergy analyses of atomic layer deposition (ALD) of Al2O3 nano-film has been conducted. First, based on the first law of thermodynamics, the energy flow in ALD of Al2O3 nano-film preparation system is analysed. Second, the exergy flow in the system is analysed based on the second law of thermodynamics. Two different kinds of exergy efficiencies are introduced, including the simplest definition for exergy efficiency and the degree of perfection. In the end, the exergy efficiency in this system is calculated by using the two kinds of exergy efficiency calculation methods. The results of analyses on the ALD of the Al2O3 nano-film process demonstrate the extremely low efficiency of energy in the ALD system. Thus, it is necessary and meaningful to find ways to reduce energy consumption and improve the energy utilisation efficiency in ALD operation process.

引用

页码：62 / 75

页数：14

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