Energy and exergy analyses of atomic layer deposition of Al2O3 nano-film process

In this paper, energy and exergy analyses of atomic layer deposition (ALD) of Al2O3 nano-film has been conducted. First, based on the first law of thermodynamics, the energy flow in ALD of Al2O3 nano-film preparation system is analysed. Second, the exergy flow in the system is analysed based on the second law of thermodynamics. Two different kinds of exergy efficiencies are introduced, including the simplest definition for exergy efficiency and the degree of perfection. In the end, the exergy efficiency in this system is calculated by using the two kinds of exergy efficiency calculation methods. The results of analyses on the ALD of the Al2O3 nano-film process demonstrate the extremely low efficiency of energy in the ALD system. Thus, it is necessary and meaningful to find ways to reduce energy consumption and improve the energy utilisation efficiency in ALD operation process.