Fabrication of ZnO thin films by femtosecond pulsed laser deposition

被引：22
作者：
Chau, Joseph Lik Hang [1 ]
Yang, Min-Chieh [2 ]
Nakamura, Takahiro [3 ]
Sato, Shunichi [3 ]
Yang, Chih-Chao [1 ]
Cheng, Chung-Wei [2 ]
机构：
[1] Ind Technol Res Inst, ITRI S, Nanopowder & Thin Film Technol Ctr, Tainan, Taiwan
[2] Ind Technol Res Inst, ITRI S, Laser Applicat & Technol Ctr, Tainan, Taiwan
[3] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, Sendai, Miyagi 980, Japan
来源：
OPTICS AND LASER TECHNOLOGY | 2010年 / 42卷 / 08期
关键词：
Femtosecond; Zinc oxide; Thin films; TEMPERATURE; HYDROGEN;
D O I：
10.1016/j.optlastec.2010.04.015
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The growth of ZnO thin films on sapphire substrate using the femtosecond PLD technique is reported. The effect of substrate temperature and oxygen pressure on the structural properties of the films was studied. Highly c-axis oriented ZnO films can be grown on sapphire substrates under vacuum conditions using the femtosecond PLD process. There is an optimum substrate temperature for the pulsed laser deposition of ZnO film that enhances the thermodynamic stability and allows the formation of well-crystallized thin films. The crystal quality of the films can be further improved by increasing the deposition time and introducing oxygen during the pulsed laser deposition process. (c) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1337 / 1339
页数：3
相关论文
共 16 条
  • [1] Nanopillar ZnO gas sensor for hydrogen and ethanol
    Bie, Li-Jian
    Yan, Xiao-Na
    Yin, Jing
    Duan, Yue-Qin
    Yuan, Zhi-Hao
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2007, 126 (02) : 604 - 608
  • [2] METHANOL SYNTHESIS FROM CO2 AND H-2 OVER A ZNO CATALYST - EFFECT OF THE PRETREATMENT WITH CO-H-2 UPON THE REACTION
    FUJITA, S
    ITO, H
    TAKEZAWA, N
    [J]. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1993, 66 (10) : 3094 - 3096
  • [3] Ultraviolet light emitting diode with n-ZnO:Ga/i-ZnO/p-GaN:Mg heterojunction
    Han, Won Suk
    Kim, Young Yi
    Kong, Bo Hyun
    Cho, Hyung Koun
    [J]. THIN SOLID FILMS, 2009, 517 (17) : 5106 - 5109
  • [4] High-performance low-temperature transparent conducting aluminum-doped ZnO thin films and applications
    Hao, XT
    Tan, LW
    Ong, KS
    Zhu, FR
    [J]. JOURNAL OF CRYSTAL GROWTH, 2006, 287 (01) : 44 - 47
  • [5] Molecular beam epitaxy of high-quality ZnO using hydrogen peroxide as an oxidant
    Izyumskaya, N
    Avrutin, V
    Schoch, W
    El-Shaer, A
    Reuss, F
    Gruber, T
    Waag, A
    [J]. JOURNAL OF CRYSTAL GROWTH, 2004, 269 (2-4) : 356 - 361
  • [6] Cu-doped ZnO-based p-n hetero-junction light emitting diode
    Kim, J. B.
    Byun, D.
    Ie, S. Y.
    Park, D. H.
    Choi, W. K.
    Choi, Ji-Won
    Angadi, Basavaraj
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2008, 23 (09)
  • [7] Growth of ZnO thin films by ultraviolet pulsed-laser ablation: Study of plume dynamics
    Klini, A
    Manousaki, A
    Anglos, D
    Fotakis, C
    [J]. JOURNAL OF APPLIED PHYSICS, 2005, 98 (12)
  • [8] XRD study on the effect of the deposition condition on pulsed laser deposition of ZnO films
    Man, Bao Y.
    Xi, Hong Z.
    Chen, Chuan S.
    Liu, Mei
    Wei, Jing
    [J]. CENTRAL EUROPEAN JOURNAL OF PHYSICS, 2008, 6 (03): : 643 - 647
  • [9] ZnO nanotube based dye-sensitized solar cells
    Martinson, Alex B. F.
    Elam, Jeffrey W.
    Hupp, Joseph T.
    Pellin, Michael J.
    [J]. NANO LETTERS, 2007, 7 (08) : 2183 - 2187
  • [10] Growth of heteroepitaxial ZnO thin films by femtosecond pulsed-laser deposition
    Millon, E
    Albert, O
    Loulergue, JC
    Etchepare, J
    Hulin, D
    Seiler, W
    Perrière, J
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (11) : 6937 - 6939
12