共 10 条
[1]
BAO Y, 2001, 4 IEEE INT C OCT, V2, P871
[2]
CLARK WA, 1997, MICROMACHINED VIBRAT
[3]
Fedder GK., 1994, Simulation of microelectromechanical systems
[4]
IYER SV, 2003, THESIS CAMEGIE MELLO
[6]
A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes
[J].
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
1999,
:618-623
[7]
PALANIAPAN M, 2002, THESIS U CAIFORNIA B
[8]
WANG MC, 1988, THEORY NUMERIC METHO, P23
[9]
YILONG H, 2001, JMECH STRENGTH, V23, P523
[10]
ZHANG LF, 2002, MECH MATER, P204