Design of an optical interferometric modulator based on MOEMS

An optical interferometric modulator based on MOEMS(Micro-Opto-Electro-Mechanic system) technology is designed. The device consists of silver film and chromic film separated by an air gap. The optical properties are analyzed using induced reflection filter concept. As the matching layer, the air gap is sensitive to the reflection spectrum. The upper mirror will deform with electrostatic force actuated. With no voltage applied, the optical property of this device is high reflective at the central wavelength. But when a voltage is applied, the film assembly will absorb the incident light and it turns black. Silver film has high reflection properties and chromium film has high absorption properties. So the filter has good rejection. Furthermore high saturation red, green, blue color can be achieved at various air gaps. Properly initial air gap length designed, the modulation is made between red, green, blue and black with voltages applied. The device shows much promise as the basic element for color flat panel display.