Predictive Modeling of Channel Potential in 3-D NAND Flash Memory

被引:20
作者
Kim, Yoon [1 ]
Kang, Myounggon [1 ]
机构
[1] Samsung Elect Co Ltd, Memory Div, Hwaseong 445701, South Korea
关键词
3-D NAND flash memory; capacitance modeling; nanowire SONOS; stacked array;
D O I
10.1109/TED.2014.2355918
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the first time, this brief analyzes the channel potential and capacitance in channel-stack type 3-D NAND flash memory structure. In addition, the effects of geometrical parameters on 3-D NAND flash design with gate-all-around and double-gate devices are studied. The model can be incorporated into a compact circuit model for 3-D NAND flash design optimization.
引用
收藏
页码:3901 / 3904
页数:4
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