Doping process and tool for surface treatment using large-area ion beams

被引：0
|
作者：
Inouchi, Yutaka [1 ]
Matsumoto, Takeshi [1 ]
Tatemichi, Junichi [1 ]
Konishi, Masashi [1 ]
Naito, Masao [1 ]
机构：
[1] Nissin Ion Equipment Co Ltd, FPD Machine Business Ctr, 29 Hinokigaoka,Minakuchi Cho, Koka, Shiga 5280068, Japan
来源：
2016 21ST INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT) | 2016年
关键词：
ion implantation; ion doping; ion beam; ion irradiation; smart cut; brittleness of glass; nanocones; TRANSPARENT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Ion doping tools which have ability to process large size glass substrate with high productivity are briefly described. Such tools might develop new fields that utilize ion implantation technology. So far we tried several applications. In this study, three applications for which large area treatment will be essential to commercial production are reported.
引用
收藏
页数：6
相关论文
共 50 条
  • [1] Large-area surface treatment by ion beam technique
    Wu, RLC
    Lanter, W
    Wrbanek, J
    DeJoseph, C
    SURFACE & COATINGS TECHNOLOGY, 2001, 140 (01): : 35 - 43
  • [2] Production of large-area plasmas by electron beams
    Fernsler, R.F.
    Manheimer, W.M.
    Meger, R.A.
    Mathew, J.
    Murphy, D.P.
    Pechacek, R.E.
    Gregor, J.A.
    Physics of Plasmas, 1998, 5 (5 pt 2): : 2137 - 2143
  • [3] Production of large-area plasmas by electron beams
    Fernsler, RF
    Manheimer, WM
    Meger, RA
    Mathew, J
    Murphy, DP
    Pechacek, RE
    Gregor, JA
    PHYSICS OF PLASMAS, 1998, 5 (05) : 2137 - 2143
  • [4] Large-area uniform surface treatment of polymeric materials using a scanning plasma method
    Yang, SC
    Yanagi, J
    Yamamoto, K
    Uyama, H
    Fujiyama, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (7B): : 4527 - 4530
  • [5] Large-area uniform surface treatment of polymeric materials using a scanning plasma method
    Yang, Sung-Chae
    Yanagi, Junichi
    Yamamoto, Kyoichi
    Uyama, Haruo
    Fujiyama, Hiroshi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (7 B): : 4527 - 4530
  • [6] Feasibility study of material surface treatment using an atmospheric large-area glow plasma
    Moon, SY
    Han, JW
    Choe, W
    THIN SOLID FILMS, 2006, 506 : 355 - 359
  • [7] Implementation of a large-area slippery surface using a transparent organogel
    Lee, Sang Hoon
    Kim, Woo Young
    Shin, Seungwoo
    Park, Seo Rim
    Kim, Myung Seo
    Jo, In Su
    Yoon, Seong Min
    Chang, Won Seok
    Jeon, Sohee
    Kwon, Sin
    Choi, Su Hyun
    Kim, Seok
    Cho, Young Tae
    MATERIALS TODAY CHEMISTRY, 2024, 39
  • [8] LARGE-AREA ION DOPING TECHNIQUE WITH BUCKET-TYPE ION-SOURCE FOR POLYCRYSTALLINE SILICON FILMS
    KAWACHI, G
    AOYAMA, T
    MIYATA, K
    OHNO, Y
    MIMURA, A
    KONISHI, N
    MOCHIZUKI, Y
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (11) : 3522 - 3526
  • [9] LEVITATION IN TREATMENT OF LARGE-AREA BURNS
    SANDERS, R
    SCALES, JT
    MUIR, IFK
    LANCET, 1970, 2 (7675): : 677 - +
  • [10] LEVITATION IN TREATMENT OF LARGE-AREA BURNS
    SCALES, JT
    HOPKINS, LA
    BLOCH, M
    TOWERS, AG
    MUIR, IFK
    LANCET, 1967, 1 (7502): : 1235 - &
12345