共 38 条
- [22] Capillary Force Based Micromanipulation of Chips Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2023, 59 (06): : 285 - 308
- [28] Self-alignment of whole wafers using patterning for capillary forces JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2023, 41 (03):