Features of the spectra of optical emission from high-frequency discharge plasma during bismuth ferrite sputtering

被引：4

作者：

Plyaka, P. S. ^{[1
]}

Tolmachev, G. N.

机构：

[1] Russian Acad Sci, So Res Ctr, Rostov Na Donu, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2010年 / 36卷 / 02期

关键词：

FILMS;

D O I：

10.1134/S106378501002029X

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

he spectra of optical emission from plasma of the RF discharge in oxygen during the sputtering of bismuth ferrite (BiFeO(3)) and iron-containing alloy targets have been studied. Two anomalously intense lines of emission from iron atoms at 613.6 and 306.7 nm have been observed during the sputtering of bismuth ferrite, which are much less pronounced in the case of metal targets. The lines of emission from bismuth atoms are completely absent. A mechanism responsible for excitation of the anomalous emission lines during the sputtering of BiFeO(3) is proposed.

引用

页码：192 / 194

页数：3

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