Synthesis and application of composite TIC-CR3C2 targets

TiC-Cr3C2 composite targets have been produced via simultaneous combustion synthesis and hot pressing process. The potential application of this composite system as PVD sputter targets for deposition of wear resistant coatings is expected as TiN and CrN are widely used and the complex nitride TiCrN shows higher hardness than both simple compounds. The addition of carbon to the system intends to allow for the formation of carbides which are not normally obtained via reactive sputtering of pure targets in carbon rich atmospheres, e.g. CH4. In the case of Cr, only lower carbides have been produced, e.g. Cr23C6 and Cr7C3. Therefore, incorporating Cr3C2 into a composite target could provide a means of achieving a Cr3C2 thin films economically. Composites with three different compositions involving TiC-Cr3C2 were produced and tested with respect to their mechanical properties. Targets of these composites have been used to produce thin films using RF sputtering. (C) 1997 Elsevier Science S.A.