Microwave surfatron system for plasma processing

被引：9

作者：

Bardos, L

Barankova, H

Berg, S

机构：

[1] Angstrom Consortium Thin Film Proc., Uppsala University

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 02期

关键词：

D O I：

10.1116/1.580109

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

[No abstract available]

引用

页码：474 / 477

页数：4

共 11 条

[1] STUDIES OF THE OPTICAL-EMISSION FROM A HYDROGEN HYDROCARBON RF PLASMA-JET STREAM DURING DIAMOND FILM DEPOSITION [J].

BARANKOVA, H ;

BARDOS, L ;

BERG, S .

[2] DIFFERENCES BETWEEN MICROWAVE AND RF ACTIVATION OF NITROGEN FOR THE PECVD PROCESS [J].

BARDOS, L ;

MUSIL, J ;

TARAS, P .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (07) :L79-L82

[3] NITROGEN ACTIVATION FOR PLASMA CHEMICAL SYNTHESIS OF THIN SI3N4 FILMS [J].

BARDOS, L ;

MUSIL, J ;

TARAS, P .

THIN SOLID FILMS, 1983, 102 (02) :107-110

[4]

BARDOS L, 1993, Patent No. 93022226

[5] A NOVEL TECHNIQUE FOR DIAMOND FILM DEPOSITION USING SURFACE-WAVE DISCHARGES [J].

BORGES, CFM ;

MOISAN, M ;

GICQUEL, A .

[6] RUNNING WAVE-GUIDE DISCHARGE FOR INNER COATING OF METAL TUBES [J].

HYTRY, R ;

MOLLER, W ;

WILHELM, R .

APPLIED PHYSICS LETTERS, 1994, 64 (25) :3401-3403

[7] ELECTRON-CYCLOTRON-RESONANCE DEVICES WITH PERMANENT-MAGNETS FOR PRODUCTION OF LARGE-DIAMETER UNIFORM PLASMAS [J].

IIZUKA, S ;

SATO, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (7B) :4221-4225

[8] PRODUCTION OF LARGE-DIAMETER MICROWAVE PLASMA USING AN ANNULAR SLOT ANTENNA [J].

IKUSHIMA, T ;

OKUNO, Y ;

FUJITA, H .

APPLIED PHYSICS LETTERS, 1994, 64 (01) :25-27

[9] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].

KAMO, M ;

SATO, Y ;

MATSUMOTO, S ;

SETAKA, N .

JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644

[10] THE WAVE-GUIDE SURFATRON - A HIGH-POWER SURFACE-WAVE LAUNCHER TO SUSTAIN LARGE-DIAMETER DENSE-PLASMA COLUMNS [J].

MOISAN, M ;

CHAKER, M ;

ZAKRZEWSKI, Z ;

PARASZCZAK, J .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (11) :1356-1361

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