Microwave surfatron system for plasma processing

[1] STUDIES OF THE OPTICAL-EMISSION FROM A HYDROGEN HYDROCARBON RF PLASMA-JET STREAM DURING DIAMOND FILM DEPOSITION [J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) : 347 - 352

[2] DIFFERENCES BETWEEN MICROWAVE AND RF ACTIVATION OF NITROGEN FOR THE PECVD PROCESS [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (07) : L79 - L82

[3] NITROGEN ACTIVATION FOR PLASMA CHEMICAL SYNTHESIS OF THIN SI3N4 FILMS [J]. THIN SOLID FILMS, 1983, 102 (02) : 107 - 110

[4] BARDOS L, 1993, Patent No. 93022226

[5] A NOVEL TECHNIQUE FOR DIAMOND FILM DEPOSITION USING SURFACE-WAVE DISCHARGES [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (02) : 149 - 154

[6] RUNNING WAVE-GUIDE DISCHARGE FOR INNER COATING OF METAL TUBES [J]. APPLIED PHYSICS LETTERS, 1994, 64 (25) : 3401 - 3403

[7] ELECTRON-CYCLOTRON-RESONANCE DEVICES WITH PERMANENT-MAGNETS FOR PRODUCTION OF LARGE-DIAMETER UNIFORM PLASMAS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (7B): : 4221 - 4225

[8] PRODUCTION OF LARGE-DIAMETER MICROWAVE PLASMA USING AN ANNULAR SLOT ANTENNA [J]. APPLIED PHYSICS LETTERS, 1994, 64 (01) : 25 - 27

[9] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644

[10] THE WAVE-GUIDE SURFATRON - A HIGH-POWER SURFACE-WAVE LAUNCHER TO SUSTAIN LARGE-DIAMETER DENSE-PLASMA COLUMNS [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (11): : 1356 - 1361

[1] STUDIES OF THE OPTICAL-EMISSION FROM A HYDROGEN HYDROCARBON RF PLASMA-JET STREAM DURING DIAMOND FILM DEPOSITION [J]. DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) : 347 - 352

[2] DIFFERENCES BETWEEN MICROWAVE AND RF ACTIVATION OF NITROGEN FOR THE PECVD PROCESS [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (07) : L79 - L82

[3] NITROGEN ACTIVATION FOR PLASMA CHEMICAL SYNTHESIS OF THIN SI3N4 FILMS [J]. THIN SOLID FILMS, 1983, 102 (02) : 107 - 110

[4] BARDOS L, 1993, Patent No. 93022226

[5] A NOVEL TECHNIQUE FOR DIAMOND FILM DEPOSITION USING SURFACE-WAVE DISCHARGES [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (02) : 149 - 154

[6] RUNNING WAVE-GUIDE DISCHARGE FOR INNER COATING OF METAL TUBES [J]. APPLIED PHYSICS LETTERS, 1994, 64 (25) : 3401 - 3403

[7] ELECTRON-CYCLOTRON-RESONANCE DEVICES WITH PERMANENT-MAGNETS FOR PRODUCTION OF LARGE-DIAMETER UNIFORM PLASMAS [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (7B): : 4221 - 4225

[8] PRODUCTION OF LARGE-DIAMETER MICROWAVE PLASMA USING AN ANNULAR SLOT ANTENNA [J]. APPLIED PHYSICS LETTERS, 1994, 64 (01) : 25 - 27

[9] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644

[10] THE WAVE-GUIDE SURFATRON - A HIGH-POWER SURFACE-WAVE LAUNCHER TO SUSTAIN LARGE-DIAMETER DENSE-PLASMA COLUMNS [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (11): : 1356 - 1361