III-Nitride wide bandgap semiconductors: a survey of the current status and future trends of the material and device technology

被引:0
|
作者
Kung, P [1 ]
Razeghi, M [1 ]
机构
[1] Northwestern Univ, Ctr Quantum Devices, Dept Elect & Comp Engn, Evanston, IL 60208 USA
关键词
III-Nitrides; AlN; GaN; AlxGa1-xN; Ga1-xInxN; visible; ultraviolet; violet; blue; green; heterostructures; n-type doping; p-type; doping; etching; metal contacts; electronic devices; photodetectors; light emitting diodes; laser diodes;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
During the past decade, group III-Nitride wide bandgap semiconductors have become the focus of extremely intensive reearch because of their exceptional physical properties and their high potential for use in countless numbers of applications. Nearly all aspects have been investigated, from the fundamental physical understanding of these materials to the development of the fabrication technology and demonstration of commercial devices. The purpose of this paper is to review the physical properties of III-Nitrides, their areas of application, the current status of the material technology (AIN, AlGaN, GaN, GaInN) including synthesis and processing. The state-of-the-art of III-Nitride material quality, as well as the devices which have been demonstrated, including electronic devices, AlxGa1-xN ultraviolet photoconductors, ultraviolet photodiodes, visible light emitting diodes (LEDs) and ultraviolet-blue laser diodes, will also be presented.
引用
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页码:201 / 239
页数:39
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