共 19 条
[11]
Lakin KM, 1995, ULTRASON, P905, DOI 10.1109/ULTSYM.1995.495711
[12]
Larson JD, 2000, ULTRASON, P863, DOI 10.1109/ULTSYM.2000.922679
[14]
Ren TL, 2001, SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, P726, DOI 10.1109/ICSICT.2001.981606
[15]
Ruby R., 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177), P120, DOI 10.1109/ISSCC.2001.912569
[16]
RUBY R, 1994, P IEEE INT FREQ CONT, P135, DOI 10.1109/FREQ.1994.398344
[17]
VALE C, 1990, PROCEEDINGS OF THE 44TH ANNUAL SYMPOSIUM ON FREQUENCY CONTROL 1990, P332, DOI 10.1109/FREQ.1990.177515
[18]
YOON G, 2000, P ICMMT, P192
[19]
Air-backed al/Zno/Al film bulk acoustic resonator without any support layer
[J].
PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION,
2002,
:20-26