Fabrication and characterization of 2-DOF micro convective accelerometer

被引：0

作者：

Dao, Dzung V. ^{[1
]}

Dau, Van T. ^{[2
]}

Hayashida, M. ^{[2
]}

Dinh, T. X. ^{[2
]}

Shiozawa, T. ^{[3
]}

Sugiyama, S. ^{[2
]}

机构：

[1] Ritsumeikan Univ, COE Ctr, Kyoto 5258577, Japan

[2] Ritsumeikan Univ, Micro Tech, Kyoto 5258577, Japan

[3] Tamagawa Corp, Kyoto 5258577, Japan

来源：

2006 IEEE SENSORS, VOLS 1-3 | 2006年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This paper presents the development of a dual axis convective microaccelerometer, whose working principle is based on the convective heat transfer and thermo-resistive effect of lightly-doped silicon. Different with developed convective accelerometer, the sensor utilizes novel structures of the sensing element which can reduce at least 93% of thermal-induced stress. By using numerical method, the chip dimensions and the package size are optimized. The sensitivity of the sensor was simulated; other characteristics such as frequency response, shock resistance, noise problem are also deeply investigated. The sensor has been fabricated by MEMS process and characterized by experiments.

引用

页码：1353 / +

页数：2

共 13 条

[1]

BILLAR S, 2000, SENSOR ACTUATOR, V97, P125

[2]

Dao DV, 2003, SENSOR MATER, V15, P113

[3]

JIANG F, 1994, SOL STAT SENS ACT WO, P264

[4]

LEUNG AM, P IEEE MEMS98, P487