共 29 条
Amorphous Tin Oxide Applied to Solution Processed Thin-Film Transistors
被引:19
作者:

Avis, Christophe
论文数: 0 引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea

Kim, YounGoo
论文数: 0 引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea

Jang, Jin
论文数: 0 引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
机构:
[1] Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
[2] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
来源:
关键词:
tin oxide;
thin-film transistor;
hafnium oxide;
solution process;
amorphous oxide semiconductor;
GATE DIELECTRICS;
SOL-GEL;
PERFORMANCE;
SNO2;
TEMPERATURE;
D O I:
10.3390/ma12203341
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
The limited choice of materials for large area electronics limits the expansion of applications. Polycrystalline silicon (poly-Si) and indium gallium zinc oxide (IGZO) lead to thin-film transistors (TFTs) with high field-effect mobilities (>10 cm(2)/Vs) and high current ON/OFF ratios (I-On/I-Off > similar to 10(7)). But they both require vacuum processing that needs high investments and maintenance costs. Also, IGZO is prone to the scarcity and price of Ga and In. Other oxide semiconductors require the use of at least two cations (commonly chosen among Ga, Sn, Zn, and In) in order to obtain the amorphous phase. To solve these problems, we demonstrated an amorphous oxide material made using one earth-abundant metal: amorphous tin oxide (a-SnOx). Through XPS, AFM, optical analysis, and Hall effect, we determined that a-SnOx is a transparent n-type oxide semiconductor, where the SnO2 phase is predominant over the SnO phase. Used as the active material in TFTs having a bottom-gate, top-contact structure, a high field-effect mobility of similar to 100 cm(2)/Vs and an I-On/I-Off ratio of similar to 10(8) were achieved. The stability under 1 h of negative positive gate bias stress revealed a Vth shift smaller than 1 V.
引用
收藏
页数:9
相关论文
共 29 条
[1]
Structural and electronic properties of SnO2
[J].
Akgul, Funda Aksoy
;
Gumus, Cebrail
;
Er, Ali O.
;
Farha, Ashraf H.
;
Akgul, Guvenc
;
Ufuktepe, Yuksel
;
Liu, Zhi
.
JOURNAL OF ALLOYS AND COMPOUNDS,
2013, 579
:50-56

Akgul, Funda Aksoy
论文数: 0 引用数: 0
h-index: 0
机构:
Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey
Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey

Gumus, Cebrail
论文数: 0 引用数: 0
h-index: 0
机构:
Cukurova Univ, Dept Phys, TR-01330 Adana, Turkey Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey

Er, Ali O.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Irvine, Dept Chem, Irvine, CA 92612 USA Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey

Farha, Ashraf H.
论文数: 0 引用数: 0
h-index: 0
机构:
Old Dominion Univ, Norfolk, VA 23529 USA
Ain Shams Univ, Dept Phys, Cairo 11566, Egypt Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey

Akgul, Guvenc
论文数: 0 引用数: 0
h-index: 0
机构:
Nigde Univ, Bor Vocat Sch, TR-51700 Nigde, Turkey Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey

Ufuktepe, Yuksel
论文数: 0 引用数: 0
h-index: 0
机构:
Cukurova Univ, Dept Phys, TR-01330 Adana, Turkey Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey

Liu, Zhi
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA Nigde Univ, Dept Phys, TR-51240 Nigde, Turkey
[2]
Effect Of Channel Layer Thickness On The Performance Of Indium-Zinc-Tin Oxide Thin Film Transistors Manufactured By Inkjet Printing
[J].
Avis, Christophe
;
Hwang, Hye Rim
;
Jang, Jin
.
ACS APPLIED MATERIALS & INTERFACES,
2014, 6 (14)
:10941-10945

Avis, Christophe
论文数: 0 引用数: 0
h-index: 0
机构: Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea

Hwang, Hye Rim
论文数: 0 引用数: 0
h-index: 0
机构: Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea

Jang, Jin
论文数: 0 引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
[3]
High-performance solution processed oxide TFT with aluminum oxide gate dielectric fabricated by a sol-gel method
[J].
Avis, Christophe
;
Jang, Jin
.
JOURNAL OF MATERIALS CHEMISTRY,
2011, 21 (29)
:10649-10652

Avis, Christophe
论文数: 0 引用数: 0
h-index: 0
机构: Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea

Jang, Jin
论文数: 0 引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
[4]
Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a 'sol-gel on chip' process
[J].
Banger, K. K.
;
Yamashita, Y.
;
Mori, K.
;
Peterson, R. L.
;
Leedham, T.
;
Rickard, J.
;
Sirringhaus, H.
.
NATURE MATERIALS,
2011, 10 (01)
:45-50

Banger, K. K.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

Yamashita, Y.
论文数: 0 引用数: 0
h-index: 0
机构:
Panasonic Corp, Osaka 5718501, Japan Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

Mori, K.
论文数: 0 引用数: 0
h-index: 0
机构:
Panason R&D Ctr Europe, Cambridge Liaison Off, Cambridge CB3 0AX, England Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

Peterson, R. L.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

Leedham, T.
论文数: 0 引用数: 0
h-index: 0
机构: Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

Rickard, J.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England

Sirringhaus, H.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England Univ Cambridge, Cavendish Lab, Dept Phys, Cambridge CB3 0HE, England
[5]
Electrical Performance and Reliability Improvement of Amorphous-Indium-Gallium-Zinc-Oxide Thin-Film Transistors with HfO2 Gate Dielectrics by CF4 Plasma Treatment
[J].
Fan, Ching-Lin
;
Tseng, Fan-Ping
;
Tseng, Chiao-Yuan
.
MATERIALS,
2018, 11 (05)

Fan, Ching-Lin
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Taiwan Univ Sci & Technol, Dept Elect Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan
Natl Taiwan Univ Sci & Technol, Grad Inst Electroopt Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan Natl Taiwan Univ Sci & Technol, Dept Elect Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan

Tseng, Fan-Ping
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Taiwan Univ Sci & Technol, Grad Inst Electroopt Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan Natl Taiwan Univ Sci & Technol, Dept Elect Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan

Tseng, Chiao-Yuan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Taiwan Univ Sci & Technol, Dept Elect Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan Natl Taiwan Univ Sci & Technol, Dept Elect Engn, 43 Sect 4,Keelung Rd, Taipei 106, Taiwan
[6]
Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances
[J].
Fortunato, E.
;
Barquinha, P.
;
Martins, R.
.
ADVANCED MATERIALS,
2012, 24 (22)
:2945-2986

Fortunato, E.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nova Lisboa, CENIMAT I3N, Dept Ciencia Mat, Fac Ciencias & Tecnol,FCT, P-2829516 Caparica, Portugal
CEMOP UNINOVA, P-2829516 Caparica, Portugal Univ Nova Lisboa, CENIMAT I3N, Dept Ciencia Mat, Fac Ciencias & Tecnol,FCT, P-2829516 Caparica, Portugal

Barquinha, P.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nova Lisboa, CENIMAT I3N, Dept Ciencia Mat, Fac Ciencias & Tecnol,FCT, P-2829516 Caparica, Portugal
CEMOP UNINOVA, P-2829516 Caparica, Portugal Univ Nova Lisboa, CENIMAT I3N, Dept Ciencia Mat, Fac Ciencias & Tecnol,FCT, P-2829516 Caparica, Portugal

Martins, R.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Nova Lisboa, CENIMAT I3N, Dept Ciencia Mat, Fac Ciencias & Tecnol,FCT, P-2829516 Caparica, Portugal
CEMOP UNINOVA, P-2829516 Caparica, Portugal Univ Nova Lisboa, CENIMAT I3N, Dept Ciencia Mat, Fac Ciencias & Tecnol,FCT, P-2829516 Caparica, Portugal
[7]
Band gap and work function tailoring of SnO2 for improved transparent conducting ability in photovoltaics
[J].
Ganose, Alex M.
;
Scanlon, David O.
.
JOURNAL OF MATERIALS CHEMISTRY C,
2016, 4 (07)
:1467-1475

Ganose, Alex M.
论文数: 0 引用数: 0
h-index: 0
机构:
UCL, Kathleen Lonsdale Mat Chem, Dept Chem, 20 Gordon St, London WC1H 0AJ, England
Diamond Light Source Ltd, Diamond House,Harwell Sci & Innovat Campus, Didcot OX11 0DE, Oxon, England UCL, Kathleen Lonsdale Mat Chem, Dept Chem, 20 Gordon St, London WC1H 0AJ, England

Scanlon, David O.
论文数: 0 引用数: 0
h-index: 0
机构:
UCL, Kathleen Lonsdale Mat Chem, Dept Chem, 20 Gordon St, London WC1H 0AJ, England
Diamond Light Source Ltd, Diamond House,Harwell Sci & Innovat Campus, Didcot OX11 0DE, Oxon, England UCL, Kathleen Lonsdale Mat Chem, Dept Chem, 20 Gordon St, London WC1H 0AJ, England
[8]
High-Mobility Solution-Processed Tin Oxide Thin-Film Transistors with High-κ Alumina Dielectric Working in Enhancement Mode
[J].
Huang, Genmao
;
Duan, Lian
;
Dong, Guifang
;
Zhang, Deqiang
;
Qiu, Yong
.
ACS APPLIED MATERIALS & INTERFACES,
2014, 6 (23)
:20786-20794

Huang, Genmao
论文数: 0 引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China

Duan, Lian
论文数: 0 引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China

Dong, Guifang
论文数: 0 引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China

Zhang, Deqiang
论文数: 0 引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China

Qiu, Yong
论文数: 0 引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China Tsinghua Univ, Dept Chem, Minist Educ, Key Lab Organ Optoelect & Mol Engn, Beijing 100084, Peoples R China
[9]
Transparent High-Performance Thin Film Transistors from Solution-Processed SnO2/ZrO2 Gel-like Precursors
[J].
Jang, Jaewon
;
Kitsomboonloha, Rungrot
;
Swisher, Sarah L.
;
Park, Eung Seok
;
Kang, Hongki
;
Subramanian, Vivek
.
ADVANCED MATERIALS,
2013, 25 (07)
:1042-1047

Jang, Jaewon
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

Kitsomboonloha, Rungrot
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

Swisher, Sarah L.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

Park, Eung Seok
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

Kang, Hongki
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

Subramanian, Vivek
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
Sunchon Natl Univ, World Class Univ Program, Sunchon 540742, Jeonnam, South Korea Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
[10]
Intrinsic nature of visible-light absorption in amorphous semiconducting oxides
[J].
Kang, Youngho
;
Song, Hochul
;
Nahm, Ho-Hyun
;
Jeon, Sang Ho
;
Cho, Youngmi
;
Han, Seungwu
.
APL MATERIALS,
2014, 2 (03)

Kang, Youngho
论文数: 0 引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea

Song, Hochul
论文数: 0 引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea

Nahm, Ho-Hyun
论文数: 0 引用数: 0
h-index: 0
机构:
Inst for Basic Sci Korea, Ctr Correlated Electron Syst, Seoul 151747, South Korea
Seoul Natl Univ, Dept Phys & Astron, Seoul 151747, South Korea Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea

Jeon, Sang Ho
论文数: 0 引用数: 0
h-index: 0
机构:
Samsung Display Co Ltd, CAE Team, Youngin City 446711, Gyeonggi Do, South Korea Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea

Cho, Youngmi
论文数: 0 引用数: 0
h-index: 0
机构:
Samsung Display Co Ltd, CAE Team, Youngin City 446711, Gyeonggi Do, South Korea Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea

Han, Seungwu
论文数: 0 引用数: 0
h-index: 0
机构:
Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151755, South Korea