Amorphous Tin Oxide Applied to Solution Processed Thin-Film Transistors

被引:19
作者
Avis, Christophe [1 ,2 ]
Kim, YounGoo [1 ,2 ]
Jang, Jin [1 ,2 ]
机构
[1] Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
[2] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
关键词
tin oxide; thin-film transistor; hafnium oxide; solution process; amorphous oxide semiconductor; GATE DIELECTRICS; SOL-GEL; PERFORMANCE; SNO2; TEMPERATURE;
D O I
10.3390/ma12203341
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The limited choice of materials for large area electronics limits the expansion of applications. Polycrystalline silicon (poly-Si) and indium gallium zinc oxide (IGZO) lead to thin-film transistors (TFTs) with high field-effect mobilities (>10 cm(2)/Vs) and high current ON/OFF ratios (I-On/I-Off > similar to 10(7)). But they both require vacuum processing that needs high investments and maintenance costs. Also, IGZO is prone to the scarcity and price of Ga and In. Other oxide semiconductors require the use of at least two cations (commonly chosen among Ga, Sn, Zn, and In) in order to obtain the amorphous phase. To solve these problems, we demonstrated an amorphous oxide material made using one earth-abundant metal: amorphous tin oxide (a-SnOx). Through XPS, AFM, optical analysis, and Hall effect, we determined that a-SnOx is a transparent n-type oxide semiconductor, where the SnO2 phase is predominant over the SnO phase. Used as the active material in TFTs having a bottom-gate, top-contact structure, a high field-effect mobility of similar to 100 cm(2)/Vs and an I-On/I-Off ratio of similar to 10(8) were achieved. The stability under 1 h of negative positive gate bias stress revealed a Vth shift smaller than 1 V.
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页数:9
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