The cohesive crack and buckle delamination resistances of indium tin oxide (ITO) films on polymeric substrates with ductile metal interlayers

被引：50

作者：

Yang, Chan-Woo ^{[1
]}

Park, Jin-Woo ^{[1
]}

机构：

[1] Yonsei Univ, Coll Engn, Div Engn & Mat Sci, Seoul 120749, South Korea

来源：

SURFACE & COATINGS TECHNOLOGY | 2010年 / 204卷 / 16-17期

关键词：

ITO; Flexible substrate; Channel cracking; Adhesion; Buckling delamination; THIN-FILMS; ELECTRICAL-PROPERTIES; TRANSPARENT ELECTRODES; MECHANICAL-PROPERTIES; PLASTIC SUBSTRATE; LAYER; CRYSTALLIZATION; TEMPERATURE; COATINGS; DISPLAYS;

D O I：

10.1016/j.surfcoat.2010.02.033

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This work presents the effect of inserting ductile metal interlayers on crack and buckling delamination resistances of indium tin oxide (ITO) on polymeric substrates. Ag is selected as an interlayer and is deposited on polyethylene terephthalate (PET) substrates in varying thicknesses. We dc sputter-deposit 150 nm-thick ITO onto PET substrates and evaluate mechanical resistances by measuring the strains at crack initiation and delamination under tension and compression, respectively. Compared to the samples without interlayers, both the crack and delamination resistances of ITO are significantly improved by Ag interlayers over a certain thickness. The increase in crystallinity of ITO by the interlayers results in cohesive strength improvement of ITO, which is the primary factor enhancing crack resistance. Enhanced adhesion strength by the interlayers seems to improve the delamination resistance. The internal stress relief afforded by the addition of interlayers is found to have negligible effects on crack resistance compared to crystallinity. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：2761 / 2766

页数：6

共 39 条

[1]

BAL JK, 2009, PHYS REV B, V79

[2] Cracking of thin films bonded to elastic-plastic substrates [J].

Beuth, JL ;

Klingbeil, NW .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 1996, 44 (09) :1411-1428

[3]

Bouten PCP, 2005, WILEY-SID SER DISPL, P99, DOI 10.1002/0470870508.ch6

[4] Strength distributions in polycrystalline silicon MEMS [J].

Boyce, Brad L. ;

Grazier, J. Mark ;

Buchheit, Thomas E. ;

Shaw, Michael J. .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (02) :179-190

[5] Strain-dependent electrical resistance of tin-doped indium oxide on polymer substrates [J].

Cairns, DR ;

Witte, RP ;

Sparacin, DK ;

Sachsman, SM ;

Paine, DC ;

Crawford, GP ;

Newton, RR .

APPLIED PHYSICS LETTERS, 2000, 76 (11) :1425-1427

[6] Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature [J].

Cui, Hai-Ning ;

Teixeira, V. ;

Meng, Li-Jian ;

Martins, R. ;

Fortunato, E. .

VACUUM, 2008, 82 (12) :1507-1511

[7]

Freund L. B., 2003, THIN FILM MAT STRESS, P220

[8] ITO/metal/ITO multilayer structures based on Ag and Cu metal films for high-performance transparent electrodes [J].

Guillen, C. ;

Herrero, J. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2008, 92 (08) :938-941

[9]

Han JI, 2005, WILEY-SID SER DISPL, P121, DOI 10.1002/0470870508.ch7

[10] Mechanical properties of SiOx gas barrier coatings on polyester films [J].

Howells, D. G. ;

Henry, B. M. ;

Leterrier, Y. ;

Manson, J. -A. E. ;

Madocks, J. ;

Assender, H. E. .

SURFACE & COATINGS TECHNOLOGY, 2008, 202 (15) :3529-3537

← 1 2 3 4 →