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- [3] Process-induced charging damage in IGZO nTFTs 2021 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2021,
- [6] Modeling of the process-induced stress, damage, microstructure, and deformation evolution during the pyrolysis process manufacturing CMCs JOURNAL OF ADVANCED CERAMICS, 2023, 12 (12): : 2345 - 2359
- [7] Assessment of process-induced damage in high-κ transistors 2006 IEEE INTERNATIONAL CONFERENCE ON INTEGRATED CIRCUIT DESIGN AND TECHNOLOGY, PROCEEDINGS, 2006, : 96 - +