Mechanism Investigation of p-i-n ZnO-Based Light-Emitting Diodes

被引:12
作者
Lee, Ching-Ting [1 ]
Lin, Yung-Hao [1 ]
Lai, Li-Wen [1 ]
Lou, Li-Ren [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Tainan 70101, Taiwan
关键词
Cosputtering; vapor cooling condensation system; zinc oxide (ZnO) light-emitting diodes (LEDs); FILMS;
D O I
10.1109/LPT.2009.2035521
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using a cosputtering technique to deposit P-ZnO:AlN film and using a vapor cooling condensation system to deposit n-ZnO:In and i-ZnO films on sapphire substrates, thin-film-type ZnO-based light-emitting diodes (LEDs) were fabricated. A Nd:YAG laser with a wavelength of 413 nm is utilized to identify the defect-related emissions of p-ZnO, i-ZnO, and n-ZnO films. The characteristics of i-ZnO layer of ultraviolet (UV) emissions were analyzed using temperature-dependent photoluminescence. The mechanism of the UV electroluminescence emission peak at 3.20 eV observed from the p-i-n ZnO-based LEDs were attributed to the low deep-level defects and the radiative recombination occurred in the i-ZnO layer.
引用
收藏
页码:30 / 32
页数:3
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