Beam Energy Purity on Axcelis XE High Energy Ion Implanter

被引：0

作者：

Satoh, Shu ^{[1
]}

David, Jonathan ^{[1
]}

机构：

[1] Axcelis Technol, 108 Cherry Hill Dr, Beverly, MA 01915 USA

来源：

2016 21ST INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT) | 2016年

关键词：

implantation; RF linac; Energy Contamination; Energy analyzer;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The multi-stage RF acceleration in the Axcelis Purion XE high energy ion implanter has strong velocity filtering which allows only those ions with the correct flight time at the correct phase at each acceleration gap to get properly accelerated. On Purion XE, the energy spectrum exiting the RF linac is further purified with a magnetic momentum analyzer to remove any ions with the wrong energy or charge state before proceeding to electrostatic beam scanning and a magnetic parallelizing lens. A new on-tool EC detection method is introduced, which is based on the Energy Tracking System on Purion XE, to avoid the sole reliance on costly SIMS analysis for routine beam purity confirmations. We demonstrate the effectiveness of the new method and also demostrate the energy purity of Purion XE.

引用

页数：4