Microfabrication of freestanding porous silicon particles containing spectral barcodes

被引：22

作者：

Meade, Shawn O. ^{[1
]}

Sailor, Michael J. ^{[1
]}

机构：

[1] Univ Calif San Diego, Dept Chem & Biochem, La Jolla, CA 92093 USA

来源：

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | 2007年 / 1卷 / 02期

关键词：

D O I：

10.1002/pssr.200600077

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method to microfabricate micron-scale freestanding porous silicon photonic crystal particles is described. An electrochemically prepared film of porous silicon on a crystalline silicon substrate is patterned with an SU8-25 photoresist, and the unmasked porous silicon is removed with a chlorine plasma reactive ion etch. Porous microparticles are then removed from the substrate by electropolishing. Scanning electron microscopy and microscopic reflection spectroscopy are used to characterize the geometry and optical properties of the freestanding particles.

引用

页码：R71 / R73

页数：3

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