Sputtered Mo66Re34 SQUID-on-Tip for High-Field Magnetic and Thermal Nanoimaging

被引：24

作者：

Bagani, Kousik ^{[1
]}

Sarkar, Jayanta ^{[1
,5
]}

Uri, Aviram ^{[1
]}

Rappaport, Michael L. ^{[2
]}

Huber, Martin E. ^{[3
,4
]}

Zeldov, Eli ^{[1
]}

Myasoedov, Yuri ^{[1
]}

机构：

[1] Weizmann Inst Sci, Dept Condensed Matter Phys, IL-7610001 Rehovot, Israel

[2] Weizmann Inst Sci, Phys Core Facil, IL-7610001 Rehovot, Israel

[3] Univ Colorado, Dept Phys, Denver, CO 80217 USA

[4] Univ Colorado, Dept Elect Engn, Denver, CO 80217 USA

[5] Aalto Univ, Dept Appl Phys, FI-02150 Espoo, Finland

来源：

PHYSICAL REVIEW APPLIED | 2019年 / 12卷 / 04期

基金：

欧洲研究理事会;

关键词：

QUANTUM INTERFERENCE DEVICE; DEPOSITION; FERROMAGNETISM; DISSIPATION; AMPLIFIERS; INPLANE;

D O I：

10.1103/PhysRevApplied.12.044062

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Scanning nanoscale superconducting quantum interference devices (SQUIDs) are gaining interest as highly sensitive microscopic magnetic and thermal characterization tools of quantum and topological states of matter and devices. We introduce a technique of collimated differential-pressure magnetron sputtering for versatile self-aligned fabrication of SQUID-on-tip (SOT) nanodevices, which cannot be produced by conventional sputtering methods due to their diffusive, rather than the required directional point source, deposition. The technique provides access to a broad range of superconducting materials and alloys beyond the elemental superconductors employed in the existing thermal deposition methods, opening the route to greatly enhanced SOT characteristics and functionalities. Utilizing this method, we have developed molybdenum-rhenium (Mo66Re34) SOT devices with sub-50-nm diameter, magnetic flux sensitivity of 1.2 mu Phi(0)/Hz(1/2) up to 3 T at 4.2 K, and thermal sensitivity better than 4 mu K/Hz(1/2) up to 5 T-about five times higher than any previous report-paving the way to nanoscale imaging of magnetic and spintronic phenomena and of dissipation mechanisms in previously inaccessible quantum states of matter.

引用

页数：7

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