An arrangement of micrometer-sized powder particles by electron beam drawing

被引:17
作者
Fudouzi, H
Kobayashi, M
Egashira, M
Shinya, N
机构
[1] Natl. Research Institute for Metals, 5Th Research Group, Tsukuba-shi, Ibaraki 305, 1-2-1, Sengen
关键词
D O I
10.1016/S0921-8831(08)60466-5
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
The creation of new advanced functional materials is anticipated by assembling micrometersized particles which have various functions. In this work, a new concept for assembling powder particles is proposed and preliminary research results of the assembling process are reported. The process for assembling is as follows: (1) electrified patterns are formed on an insulating substrate using an electron beam drawing and are observed with an SEM by the voltage contrast method, (2) the substrates are dipped into a solvent in which particles are dispersed, and (3) the particles are adhered to the electrified patterns under suitable conditions. The number of adhered particles depends on the concentration of particles in a solvent, the electron dose of electrification and the dipping time of the substrate into the solvent. Using adequate values of these parameters, spherical silica particles of 5 mu m diameter were arranged on calcium titanate substrates.
引用
收藏
页码:251 / 262
页数:12
相关论文
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