A novel silicon photovoltaic cell using a low-temperature quasi-epitaxial silicon emitter

被引:3
作者
Farrokh-Baroughi, Mahdi [1 ]
Sivoththaman, Siva [1 ]
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
关键词
chemical vapor deposition (CVD); epitaxy; silicon; solar cell;
D O I
10.1109/LED.2007.897873
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new silicon solar cell fabricated using a low-temperature process is demonstrated with a highly conductive (n(+)) quasi-epitaxial (qEpi-Si) silicon emitter deposited on silicon substrates, without using transparent conductive oxides. The emitter was formed by a plasma-enhanced chemical vapor deposition process on granular multicrystalline silicon (mc-Si) substrates at a substrate temperature of 250 degrees C. The new (n(+))qEpi-Si/(p)mc-Si junction was found to be of good quality for photovoltaic applications. Solar cells of 1-cm(2) area and conversion efficiencies exceeding 10% have been fabricated in a simple fabrication process and device structure.
引用
收藏
页码:575 / 577
页数:3
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