共 12 条
[4]
Highly conductive n+ hydrogenated microcrystalline silicon and its application in thin film transistors
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2004, 22 (03)
:991-995
[5]
NIJS J, 1999, ITED, V46, P10
[7]
SCHROEDER DK, 1998, SEMICONDUCTOR MAT DE
[9]
Taguchi M, 2000, PROG PHOTOVOLTAICS, V8, P503, DOI 10.1002/1099-159X(200009/10)8:5<503::AID-PIP347>3.0.CO
[10]
2-G