Demonstration of the voltage-controlled three-beam interference of high-energy coherent electron beam

被引：0

作者：

Thakkar, Pooja ^{[1
,5
]}

Guzenko, Vitaliy ^{[2
]}

Abrahams, Jan Pieter ^{[1
,5
,6
]}

Tsujino, Soichiro ^{[1
,5
]}

Lu, Peng Han ^{[3
,4
]}

Dunin-Borkowski, Rafal E. ^{[3
,4
]}

机构：

[1] Paul Scherrer Inst, Div Biol & Chem, CH-5232 Villigen, Switzerland

[2] Paul Scherrer Inst, Photon Sci Div, CH-5232 Villigen, Switzerland

[3] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Electrons, Wilhelm Johnen Str, D-52425 Julich, Germany

[4] Forschungszentrum Julich, Peter Grunberg Inst, Wilhelm Johnen Str, D-52425 Julich, Germany

[5] Univ Basel, Swiss Nanosci Inst, Klingelbergstr 82, CH-4056 Basel, Switzerland

[6] Univ Basel, Biozentrum, Klingelbergstr 70, CH-4056 Basel, Switzerland

来源：

2020 33RD INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC) | 2018年

关键词：

electron wavefront; electron phase shifter; voltage controlled electron interference; transmission electron microscopy;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A Boersch phase plate facilitates in-situ control of electron phase shift by altering the phase of electrons proportionally to the applied electrical potential. A device comprising of multiple such phase shifter elements will be able to modulate the wavefront of a coherent electron beam and control electron interference. In this work, we develop a fabrication method for multi-element electron phase shifter by utilizing stateof-the-art electron beam lithography and reactive ion etching techniques. We fabricated a device with three phase shifter elements in metal-insulator-metal structure and tested its electron transmission characteristics in a transmission electron microscope at beam energy of 200 keV. The experiment confirmed the voltage-controlled evolution of electron interference for individual phase shifter element. We demonstrate the voltage-controlled phase shifting properties of phase shifter elements and analyze the experimental results in comparison with 3-dimensional electrostatic simulation.

引用

页码：71 / 72

页数：2

共 4 条

[1]

BOERSCH H, 1947, Z NATURFORSCH A, V2, P615

[2] Invited Review Article: Methods for imaging weak-phase objects in electron microscopy [J].