Numerical simulation of temperature fields during the sublimation growth of SiC single crystals, using WIAS-HiTNIHS

被引:6
作者
Geiser, Juergen
Klein, Olaf
Philip, Peter
机构
[1] Weierstr Inst Appl Anal & Stochast, WIAS, D-10117 Berlin, Germany
[2] Humboldt Univ, Dept Math, D-10099 Berlin, Germany
关键词
anisotropic thermal conductivity; computer simulation; heat transfer; growth from vapor; single crystal growth; semiconducting silicon compounds;
D O I
10.1016/j.jcrysgro.2006.11.350
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We present numerical computations of the temperature fields in axisymmetric growth apparatus for sublimation growth of silicon carbide (SiC) bulk single crystals by physical vapor transport (PVT) (modified Lely method). The results are computed using our software WIAS-HiTNIHS, the WIAS High Temperature Numerical Induction Heating Simulator; pronunciation: similar to hit-nice, by solving the energy balance in the entire growth apparatus, taking into account the heat conduction in the solid parts as well as in gas cavities, and also accounting for the radiative heat transfer between the surfaces of the gas cavities. The insulation in a PVT growth apparatus usually consists of graphite felt, where the fibers are aligned in one particular direction, resulting in an anisotropic thermal conductivity. We show that neglecting this anisotropy can overestimate the SiC crystal's temperature by 70 K or underestimate the required heating power by 800 W. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:352 / 356
页数:5
相关论文
共 20 条
[1]   Modeling of heat transfer and kinetics of physical vapor transport growth of silicon carbide crystals [J].
Chen, QS ;
Zhang, H ;
Prasad, V ;
Balkas, CM ;
Yushin, NK .
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2001, 123 (06) :1098-1109
[2]  
FUHRMANN J, 2001, P 14 GAMM SEM CONC N
[3]  
GEISER J, 2005, NUMERICAL SIMULATION
[4]   Influence of anisotropic thermal conductivity in the apparatus insulation for sublimation growth of SiC: Numerical investigation of heat transfer [J].
Geiser, Juergen ;
Klein, Olaf ;
Philip, Peter .
CRYSTAL GROWTH & DESIGN, 2006, 6 (09) :2021-2028
[5]  
HOBGOOD H, 2004, P 10 INT C SIL CARB, P457
[6]   Transient conductive-radiative heat transfer: Discrete existence and uniqueness for a finite volume scheme [J].
Klein, O ;
Philip, P .
MATHEMATICAL MODELS & METHODS IN APPLIED SCIENCES, 2005, 15 (02) :227-258
[7]  
Klein O, 2004, INTERFACE FREE BOUND, V6, P295
[8]   Transient temperature phenomena during sublimation growth of silicon carbide single crystals [J].
Klein, O ;
Philip, P .
JOURNAL OF CRYSTAL GROWTH, 2003, 249 (3-4) :514-522
[9]   Correct voltage distribution for axisymmetric sinusoidal modeling of induction heating with prescribed current, voltage, or power [J].
Klein, O ;
Philip, P .
IEEE TRANSACTIONS ON MAGNETICS, 2002, 38 (03) :1519-1523
[10]   Radiation- and convection-driven transient heat transfer during sublimation growth of silicon carbide single crystals [J].
Klein, O ;
Philip, P ;
Sprekels, J ;
Wilmanski, K .
JOURNAL OF CRYSTAL GROWTH, 2001, 222 (04) :832-851