Fiber deflection probing method based on micro focal-length collimation

被引：13
作者：
Tan, Jiubin [1 ]
Wang, Fei [1 ]
Cui, Jiwen [1 ]
机构：
[1] Harbin Inst Technol, Ultraprecis Optoelect Instrument Engn Ctr, Harbin 150080, Peoples R China
来源：
OPTICS EXPRESS | 2010年 / 18卷 / 03期
基金：
中国国家自然科学基金;
关键词：
D O I：
10.1364/OE.18.002925
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In order to improve the low displacement sensitivity in sensing the 2D deflection of a fiber probe used for measurement of micro cavities with high aspect ratio, a fiber stem with a ball mounted on its end is used as a probe and a small segment of it is used as a cylindrical lens to collimate a point light source and image it to a camera. The deflection of the fiber stem can be inferred from the change in image acquired by the camera with ultrahigh displacement sensitivities of 10,000 and 20,000 in two dimensions using a fiber stem of 44 mu m in diameter, and the corresponding resolutions are better than 1 nm and 3 nm respectively. (C) 2010 Optical Society of America
引用
收藏
页码：2925 / 2933
页数：9
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